Invention Grant
- Patent Title: Multi-temperature programming for accelerometer
- Patent Title (中): 加速度计的多温度编程
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Application No.: US11365574Application Date: 2006-03-01
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Publication No.: US07461535B2Publication Date: 2008-12-09
- Inventor: Feiming Huang , Haidong Liu
- Applicant: Feiming Huang , Haidong Liu
- Applicant Address: US MA N. Andover
- Assignee: MEMSIC, Inc.
- Current Assignee: MEMSIC, Inc.
- Current Assignee Address: US MA N. Andover
- Agency: Weingarten, Schurgin, Gagnebin & Lebovici LLP
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01D3/028

Abstract:
A system and method for testing and calibrating integrated sensor devices that improves the manufacturing test throughput of the devices. The system includes a tester, a temperature controller, and at least one probe station including a thermal chuck. The chuck can be heated to specified temperatures to achieve variable heating of a wafer, PCB, or pallet disposed thereon. The temperature controller adjusts the temperature of the chuck to a first specified level. The tester performs at least one first measurement of the output offset of each integrated sensor embodied as a die on the wafer, or as a device on the PCB or pallet. Next, the temperature controller adjusts the temperature of the chuck to a second specified level, and the tester performs at least one second measurement of the output offset of each integrated sensor at the second temperature level. The offset temperature coefficient (OTC) of each sensor is calculated based upon the output offset measurements performed at the first and second temperature levels, and optimal settings for calibrating the respective sensors are determined based upon the calculated OTC values. After the temperature of the chuck is brought back down to the first specified level, the tester programs the output offset calibration settings into each sensor.
Public/Granted literature
- US20070204672A1 Multi-temperature programming for accelerometer Public/Granted day:2007-09-06
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