Invention Grant
US07462839B2 Detector for variable pressure areas and an electron microscope comprising a corresponding detector
有权
用于可变压力区域的检测器和包括相应检测器的电子显微镜
- Patent Title: Detector for variable pressure areas and an electron microscope comprising a corresponding detector
- Patent Title (中): 用于可变压力区域的检测器和包括相应检测器的电子显微镜
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Application No.: US10500951Application Date: 2001-06-29
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Publication No.: US07462839B2Publication Date: 2008-12-09
- Inventor: Peter Gnauck , Volker Drexel , David Bate , Eric Essers
- Applicant: Peter Gnauck , Volker Drexel , David Bate , Eric Essers
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss NTS GmbH
- Current Assignee: Carl Zeiss NTS GmbH
- Current Assignee Address: DE Oberkochen
- Priority: DE10932599 20000707; DE10126698 20010531
- International Application: PCT/EP01/07431 WO 20010629
- International Announcement: WO02/05309 WO 20020117
- Main IPC: H01J37/28
- IPC: H01J37/28
Abstract:
A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.
Public/Granted literature
- US20050173644A1 Detector for variable pressure areas and an electron microscope comprising a corresponding detector Public/Granted day:2005-08-11
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