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公开(公告)号：US08164071B2
公开(公告)日：2012-04-24
申请号：US12570112
申请日：2009-09-30
Applicant: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
Inventor： Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
IPC: H01J27/00
CPC classification number: H01J37/065 , H01J1/3044 , H01J37/06 , H01J2201/30415 , H01J2201/30446 , H01J2201/30476 , H01J2237/06316 , H01J2237/06375 , H01J2237/065 , Y10T29/49888
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。
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公开(公告)号：US07507962B2
公开(公告)日：2009-03-24
申请号：US11594691
申请日：2006-11-08
Applicant: Michael D. G. Steigerwald , Dirk Preikszas , Volker Drexel
Inventor： Michael D. G. Steigerwald , Dirk Preikszas , Volker Drexel
IPC: H01J37/28 , H01J37/244
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/0458 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.
Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。
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公开(公告)号：US20090039257A1
公开(公告)日：2009-02-12
申请号：US11659145
申请日：2005-07-28
Applicant: Erik Essers , Gerd Benner , Volker Drexel
Inventor： Erik Essers , Gerd Benner , Volker Drexel
IPC: G21K7/00
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/2449
Abstract: An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.
Abstract translation: 电子束装置具有用于产生电子束的电子枪，用于将电子束聚焦在物体上的物镜和用于检测被物体背面散射的物体或电子发射的电子的至少一个检测器。 可以使用四极装置和设置在电子束装置中的这些装置的某些配置来简化和改进由物体发射或反向散射的电子的检测。
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公开(公告)号：US07425701B2
公开(公告)日：2008-09-16
申请号：US10756797
申请日：2004-01-13
Applicant: Michael D. G. Steigerwald , Dirk Preikszas , Volker Drexel
Inventor： Michael D. G. Steigerwald , Dirk Preikszas , Volker Drexel
IPC: H01J49/00
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/0458 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.
Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。
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公开(公告)号：US08536773B2
公开(公告)日：2013-09-17
申请号：US13075325
申请日：2011-03-30
Applicant: Wolfram Buehler , Volker Drexel
Inventor： Wolfram Buehler , Volker Drexel
CPC classification number: H01J3/022 , H01J1/148 , H01J1/3044 , H01J1/50 , H01J3/02 , H01J37/073 , H01J2237/06383 , H01J2237/24465 , H01J2237/24557
Abstract: An electron beam source includes a base and a tip fixed to the base and extending from the base. The tip includes a core and a coating applied to the core. The core has a surface that includes a first material. The coating includes a second material which is different from the first material. The second material forms a surface of the tip, and the second coating includes more than 30% by weight of a lanthanide element.
Abstract translation: 电子束源包括基部和固定到基部并从基部延伸的尖端。 尖端包括芯和施加到芯的涂层。 芯具有包括第一材料的表面。 涂层包括与第一材料不同的第二材料。 第二材料形成尖端的表面，第二涂层包含超过30重量％的镧系元素。
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Patent Agency Ranking
公开(公告)号：US08362443B2
公开(公告)日：2013-01-29
申请号：US13449435
申请日：2012-04-18
Applicant: Volker Drexel
Inventor： Volker Drexel
IPC: H01J3/20
CPC classification number: H01J37/145 , H01J37/141 , H01J37/1471
Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.
Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。
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公开(公告)号：US08178849B2
公开(公告)日：2012-05-15
申请号：US12551783
申请日：2009-09-01
Applicant: Volker Drexel
Inventor： Volker Drexel
IPC: H01J3/20
CPC classification number: H01J37/145 , H01J37/141 , H01J37/1471
Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.
Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。
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公开(公告)号：US07910887B2
公开(公告)日：2011-03-22
申请号：US12380596
申请日：2009-02-27
Applicant: Michael D. G. Steigerwald , Dirk Preikszas , Volker Drexel
Inventor： Michael D. G. Steigerwald , Dirk Preikszas , Volker Drexel
IPC: H01J37/28 , H01J37/244
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/0458 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.
Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。
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公开(公告)号：US20100078557A1
公开(公告)日：2010-04-01
申请号：US12570112
申请日：2009-09-30
Applicant: Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
Inventor： Volker Drexel , Ulrich Mantz , Bernd Irmer , Christian Penzkofer
CPC classification number: H01J37/065 , H01J1/3044 , H01J37/06 , H01J2201/30415 , H01J2201/30446 , H01J2201/30476 , H01J2237/06316 , H01J2237/06375 , H01J2237/065 , Y10T29/49888
Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。
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公开(公告)号：US20070120071A1
公开(公告)日：2007-05-31
申请号：US11594691
申请日：2006-11-08
Applicant: Michael Steigerwald , Dirk Preikszas , Volker Drexel
Inventor： Michael Steigerwald , Dirk Preikszas , Volker Drexel
IPC: G21G5/00
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/0458 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.
Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。
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