Invention Grant
US07463173B2 Charged particle beam apparatus, abnormality detecting method for DA converter unit, charged particle beam writing method, and mask
有权
带电粒子束装置，DA转换器单元的异常检测方法，带电粒子束写入方法和掩模
- Patent Title: Charged particle beam apparatus, abnormality detecting method for DA converter unit, charged particle beam writing method, and mask
- Patent Title (中): 带电粒子束装置，DA转换器单元的异常检测方法，带电粒子束写入方法和掩模
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Application No.: US11692409Application Date: 2007-03-28
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Publication No.: US07463173B2Publication Date: 2008-12-09
- Inventor: Yoshimasa Sanmiya , Akira Noma
- Applicant: Yoshimasa Sanmiya , Akira Noma
- Applicant Address: JP Numazu-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Numazu-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2006-097370 20060331
- Main IPC: H03M1/10
- IPC: H03M1/10
Abstract:
A charged particle beam apparatus includes a plurality of digital-analog (DA) converter units configured to input digital signals, convert the digital signals into analog values, and amplify the analog values to output the analog values, a deflector configured to input at least one analog value of the plurality of analog values output from the plurality of DA converter units to deflect a charged particle beam, and a judging unit configured to judge that at least one of the plurality of DA converter units is abnormal by using the plurality of analog values output from the plurality of DA converter units.
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