发明授权
- 专利标题: Semiconductor device and method of manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11373154申请日: 2006-03-13
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公开(公告)号: US07470998B2公开(公告)日: 2008-12-30
- 发明人: Katsuya Okumura , Koji Maruyama , Kazuya Nagaseki , Akiteru Rai
- 申请人: Katsuya Okumura , Koji Maruyama , Kazuya Nagaseki , Akiteru Rai
- 申请人地址: JP Tokyo-To JP Tokyo-To JP Osaka-Fu JP Gifu-ken
- 专利权人: Octec Inc.,Tokyo Electron Limited,Sharp Kabushiki Kaisha,Ibiden Co., Ltd.
- 当前专利权人: Octec Inc.,Tokyo Electron Limited,Sharp Kabushiki Kaisha,Ibiden Co., Ltd.
- 当前专利权人地址: JP Tokyo-To JP Tokyo-To JP Osaka-Fu JP Gifu-ken
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2003-151405 20030528; JP2004-122691 20040419
- 主分类号: H01L23/84
- IPC分类号: H01L23/84 ; H01L23/52 ; H01L29/40
摘要:
The present invention relates to a semiconductor device in which an electrode of a device formed on a substrate such as a semiconductor wafer and an electrode of a wiring structure such as an interposer are connected to each other through a connecting electrode extending through the substrate, and a method of manufacturing the same. A semiconductor device according to the present invention comprises a first substrate including a front surface and a back surface, a first device having a first electrode being formed on the front surface; and a wiring structure formed with a second electrode, the wiring structure having a principal surface. The first electrode of the first device and the second electrode of the wiring structure are connected to each other by a connecting electrode extending through the first substrate from the front surface to the back surface thereof. Substantially all the back surface of the first substrate is bonded to the principal surface of the wiring structure. A dielectric film formed between the first substrate and the wiring structure may be an adhesive layer.
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