发明授权
- 专利标题: Elastic boundary wave device, resonator, and filter
- 专利标题(中): 弹性边界波器件,谐振器和滤波器
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申请号: US11711893申请日: 2007-02-28
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公开(公告)号: US07471171B2公开(公告)日: 2008-12-30
- 发明人: Michio Miura , Satoru Matsuda , Takashi Matsuda , Masanori Ueda , Seiichi Mitobe
- 申请人: Michio Miura , Satoru Matsuda , Takashi Matsuda , Masanori Ueda , Seiichi Mitobe
- 申请人地址: JP Yokohama JP Kawasaki
- 专利权人: Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人: Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址: JP Yokohama JP Kawasaki
- 代理机构: Arent Fox LLP
- 优先权: JP2006-053486 20060228
- 主分类号: H03H9/25
- IPC分类号: H03H9/25 ; H03H9/64
摘要:
An elastic boundary wave device includes a LiNbO3 substrate, an electrode exciting an elastic wave and provided on the substrate, and a silicon oxide film provided on the substrate to cover the electrode, and parameters of the elastic boundary wave device have any one of ranges, where “θ” is a rotation Y cut angle of the substrate, “a” is a ratio of copper density with respect to a density of a material used as the electrode, “λ” is a wavelength of the elastic wave excited by the electrode, “h” is a film thickness of the electrode, “H” is a thickness of the silicon oxide film.
公开/授权文献
- US20070229192A1 Elastic boundary wave device, resonator, and filter 公开/授权日:2007-10-04
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