发明授权
- 专利标题: Apparatus and method for contacting of test objects
- 专利标题(中): 测试对象接触的装置和方法
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申请号: US11398052申请日: 2006-04-05
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公开(公告)号: US07474108B2公开(公告)日: 2009-01-06
- 发明人: Matthias Brunner
- 申请人: Matthias Brunner
- 申请人地址: DE Ismaning
- 专利权人: Applied Materials, GmbH
- 当前专利权人: Applied Materials, GmbH
- 当前专利权人地址: DE Ismaning
- 代理机构: Patterson & Sheridan, L.L.P.
- 优先权: DE10253717 20021118
- 主分类号: G01R31/305
- IPC分类号: G01R31/305 ; G01R31/28
摘要:
The invention relates to methods for positioning of a substrate and contacting of the test object for testing with a test apparatus with an optical axis and corresponding devices. Thereby, the substrate is put on the holder. The substrate is positioned relative to the optical axis. A contact unit is also positioned relative to the optical axis, whereby the contact unit is positioned independent of the positioning activity of the substrate. Thereby, a flexible contacting of test objects on the substrate can be realized.
公开/授权文献
- US20060181290A1 Apparatus and method for contacting of test objects 公开/授权日:2006-08-17
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