发明授权
US07474108B2 Apparatus and method for contacting of test objects 有权
测试对象接触的装置和方法

Apparatus and method for contacting of test objects
摘要:
The invention relates to methods for positioning of a substrate and contacting of the test object for testing with a test apparatus with an optical axis and corresponding devices. Thereby, the substrate is put on the holder. The substrate is positioned relative to the optical axis. A contact unit is also positioned relative to the optical axis, whereby the contact unit is positioned independent of the positioning activity of the substrate. Thereby, a flexible contacting of test objects on the substrate can be realized.
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