Invention Grant
- Patent Title: Piezo-actuator
- Patent Title (中): 压电致动器
-
Application No.: US10416080Application Date: 2001-11-07
-
Publication No.: US07477002B2Publication Date: 2009-01-13
- Inventor: Heinz Florian
- Applicant: Heinz Florian
- Applicant Address: DE Munich
- Assignee: EPCOS AG
- Current Assignee: EPCOS AG
- Current Assignee Address: DE Munich
- Agency: Fish & Richardson P.C.
- Priority: DE10055241 20001108
- International Application: PCT/DE01/04180 WO 20011107
- International Announcement: WO02/39510 WO 20020516
- Main IPC: H01L41/083
- IPC: H01L41/083
Abstract:
An actuator includes a stack of piezoelectric layers, and electrode layers between the piezoelectric layers. A stabilization element is attached to a side surface of the stack. The stabilization element fixes a height of the stack so that the height does not change when an operating voltage is applied to at least one of the electrode layers.
Public/Granted literature
- US20040051423A1 Piezo-actuator Public/Granted day:2004-03-18
Information query
IPC分类:
