Invention Grant
- Patent Title: Optical spot geometric parameter determination using calibration targets
- Patent Title (中): 使用校准目标的光点几何参数确定
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Application No.: US11828666Application Date: 2007-07-26
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Publication No.: US07477365B2Publication Date: 2009-01-13
- Inventor: Shahin Zangooie , Roger M. Young , Lin Zhou , Clemente Bottini , Ronald D. Fiege
- Applicant: Shahin Zangooie , Roger M. Young , Lin Zhou , Clemente Bottini , Ronald D. Fiege
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Rosa Suazo Yaghmour
- Main IPC: G01J1/00
- IPC: G01J1/00 ; G01B11/26 ; G01B11/24 ; G01B11/30 ; G01C1/00
Abstract:
A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the calibration target including a systematic variation in a parameter; measuring the calibration target with respect to the systematic variation using the light beam to obtain a plurality of measurements; and analyzing the measurements and the systematic variation to determine the geometric parameter of the optical spot.
Public/Granted literature
- US20080024781A1 Optical spot geometric parameter determination using calibration targets Public/Granted day:2008-01-31
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