发明授权
- 专利标题： Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
- 专利标题（中）： 压电元件，喷墨头，角速度传感器，其制造方法和喷墨记录装置
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申请号： US11362583申请日： 2006-02-24
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公开(公告)号： US07478558B2公开(公告)日： 2009-01-20
- 发明人: Eiji Fujii , Hideo Torii , Ryoichi Takayama , Atsushi Tomozawa , Akiko Murata , Taku Hirasawa
- 申请人： Eiji Fujii , Hideo Torii , Ryoichi Takayama , Atsushi Tomozawa , Akiko Murata , Taku Hirasawa
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP2001-384313 20011218; JP2001-384314 20011218; JP2002-138793 20020514
- 主分类号： G01C19/00
- IPC分类号： G01C19/00 ; B41J2/045 ; H01L41/04
摘要：
In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.
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