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32 条记录 (耗时 0.031 秒)

    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
    1.
    发明授权
    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus 有权
    压电元件，喷墨头，角速度传感器，其制造方法和喷墨记录装置

    公开(公告)号：US07478558B2

    公开(公告)日：2009-01-20

    申请号：US11362583

    申请日：2006-02-24

    申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    IPC分类号： G01C19/00 ,  B41J2/045 ,  H01L41/04

    CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

    摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

    摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置有（100）或（001）面。在取向控制层15的靠近第一电极层14的表面附近，（100） - 或（001） - 位于第一电极层14的靠近取向控制层15的一个表面上的钛或氧化钛上，并且沿与厚度方向垂直的方向的区域的横截面积沿着方向 远离第一电极层14朝向相对侧。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
    8.
    发明申请
    Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus 有权
    压电元件，喷墨头，角速度传感器，其制造方法和喷墨记录装置

    公开(公告)号：US20060146097A1

    公开(公告)日：2006-07-06

    申请号：US11362583

    申请日：2006-02-24

    申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    IPC分类号： B41J2/045

    CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

    摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

    摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置（100）或（001）面。 在取向控制层15的靠近第一电极层14的表面附近，位于第一电极层14的一个表面上的（100）或（001）取向区域延伸到钛或氧化钛上 更靠近取向控制层15，并且沿与厚度方向正交的方向的区域的横截面积沿远离第一电极层14的方向逐渐增大。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

    Piezoelectric element, ink jet head, angular velocity sensor, manufacturing method thereof, and ink jet type recording apparatus
    9.
    发明授权
    Piezoelectric element, ink jet head, angular velocity sensor, manufacturing method thereof, and ink jet type recording apparatus 有权
    压电元件，喷墨头，角速度传感器，其制造方法和喷墨式记录装置

    公开(公告)号：US07033001B2

    公开(公告)日：2006-04-25

    申请号：US10472589

    申请日：2002-12-12

    申请人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    发明人： Eiji Fujii ,  Hideo Torii ,  Ryoichi Takayama ,  Atsushi Tomozawa ,  Akiko Murata ,  Taku Hirasawa

    IPC分类号： B41J2/045 ,  H01L41/04

    CPC分类号： H01L41/0815 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1646 ,  B41J2002/14491 ,  B41J2202/03 ,  G01C19/5607 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/49401

    摘要： In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

    摘要翻译： 在压电元件中，在基板11上设置粘合剂层12，在粘合剂层12上设置由含有钛或氧化钛的贵金属构成的第一电极层14，优选的是取向控制层15 在第一电极层14上设置（100）或（001）面。 在取向控制层15的靠近第一电极层14的表面附近，位于第一电极层14的一个表面上的（100）或（001）取向区域延伸到钛或氧化钛上 更靠近取向控制层15，并且沿与厚度方向正交的方向的区域的横截面积沿远离第一电极层14的方向逐渐增大。 此外，在取向控制层15上设置优选沿（001）面取向的压电体层16。

    Method of fabricating an inkjet head
    10.
    发明授权
    Method of fabricating an inkjet head 失效
    制造喷墨头的方法

    公开(公告)号：US07131173B2

    公开(公告)日：2006-11-07

    申请号：US10506750

    申请日：2003-12-08

    申请人： Taku Hirasawa ,  Akiko Murata ,  Eiji Fujii ,  Hideo Torii ,  Tohru Nakagawa

    发明人： Taku Hirasawa ,  Akiko Murata ,  Eiji Fujii ,  Hideo Torii ,  Tohru Nakagawa

    IPC分类号： H04R17/00 ,  B21D53/76 ,  B44C1/22

    CPC分类号： B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1643 ,  B41J2/1646 ,  Y10S29/016 ,  Y10S29/019 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49401

    摘要： First, a first electrode layer 4, a piezoelectric layer 5, a second electrode layer 6 and an oscillation layer 7 are stacked in this order over one surface of a silicon substrate 1. Next, an ink chamber partition 8 and a nozzle plate 11 are stacked over the oscillation layer 7. Subsequently, the silicon substrate 1 is ground away to a predetermined thickness from a surface thereof opposite to the first electrode layer 4, and then a remnant silicon substrate 13 is dry etched away. Thereafter, the first electrode layer 4 is patterned to form a plurality of inkjet mechanisms 2, 2, . . . . Finally, the plurality of inkjet mechanisms 2, 2, . . . are divided to simultaneously fabricate a plurality of inkjet heads 3, 3, . . . .

    摘要翻译： 首先，在硅衬底1的一个表面上依次堆叠第一电极层4，压电层5，第二电极层6和振荡层7。 接下来，在振荡层7上层叠墨水室隔板8和喷嘴板11。 随后，从与第一电极层4相反的表面将硅衬底1磨去预定厚度，然后将残余硅衬底13干蚀刻掉。 此后，对第一电极层4进行图案化以形成多个喷墨机构2,2。 。 。 。 最后，多个喷墨机构2，2。 。 。 被分割成同时制造多个喷墨头3，3。 。 。 。