Invention Grant
US07479436B2 Feed forward silicide control scheme based on spacer height controlling preclean time
失效
基于间隔物高度控制预净化时间的前馈硅化物控制方案
- Patent Title: Feed forward silicide control scheme based on spacer height controlling preclean time
- Patent Title (中): 基于间隔物高度控制预净化时间的前馈硅化物控制方案
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Application No.: US11306717Application Date: 2006-01-09
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Publication No.: US07479436B2Publication Date: 2009-01-20
- Inventor: Ricky S. Amos , Bryant C. Colwill , Kevin E. Mello
- Applicant: Ricky S. Amos , Bryant C. Colwill , Kevin E. Mello
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Rahman, LLC
- Agent Joseph P. Abate, Esq.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Embodiments herein present a method for a feed forward silicide control scheme based on spacer height controlling pre-clean time. The method forms field effect transistor gates over a substrate and then forms spacers on the gates. Next, the method measures the spacers using an atomic force microscope to determine a measured spacer height. The method then conducts a pre-cleaning etch, wherein a duration of the pre-cleaning is adjusted according to the measured spacer height. If the measured spacer height is below a predetermined amount, the duration of the pre-cleaning is reduced; and, if the measured spacer height is above a predetermined amount, the duration of the pre-cleaning is increased.
Public/Granted literature
- US20080188014A1 FEED FORWARD SILICIDE CONTROL SCHEME BASED ON SPACER HEIGHT CONTROLLING PRECLEAN TIME Public/Granted day:2008-08-07
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