Invention Grant
- Patent Title: Memory device and method of manufacturing the same
- Patent Title (中): 存储器件及其制造方法
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Application No.: US11002812Application Date: 2004-12-03
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Publication No.: US07491997B2Publication Date: 2009-02-17
- Inventor: In-jae Song , Won-joo Kim , Sun-ae Seo
- Applicant: In-jae Song , Won-joo Kim , Sun-ae Seo
- Applicant Address: KR Suwon-Si, Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: KR10-2003-0090552 20031212
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A memory device and a method of fabricating the same are provided. The method includes forming a gate stack on a semiconductor substrate and partially exposing upper end portions of the semiconductor substrate by etching the gate stack to form a gate stack structure, and implanting a dopant into the exposed portions of the semiconductor substrate to form source and drain regions, wherein the gate stack structure is etched such that its width increases from top to bottom. Accordingly, it is possible to manufacture a memory device with high integration, using a simplified manufacture process.
Public/Granted literature
- US20050145896A1 Memory device and method of manufacturing the same Public/Granted day:2005-07-07
Information query
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