发明授权
- 专利标题: Design structures incorporating interconnect structures with liner repair layers
- 专利标题(中): 设计结构包括具有衬里修复层的互连结构
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申请号: US11875345申请日: 2007-10-19
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公开(公告)号: US07494916B2公开(公告)日: 2009-02-24
- 发明人: Louis Lu-Chen Hsu , Jack Allan Mandelman , William Robert Tonti , Chih-Chao Yang
- 申请人: Louis Lu-Chen Hsu , Jack Allan Mandelman , William Robert Tonti , Chih-Chao Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Wood, Herron & Evans, LLP
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
Design structure embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes an interconnect structure with a liner formed on roughened dielectric material in an insulating layer and a conformal liner repair layer bridging that breaches in the liner. The conformal liner repair layer is formed of a conductive material, such as a cobalt-containing material. The conformal liner repair layer may be particularly useful for repairing discontinuities in a conductive liner disposed on roughened dielectric material bordering the trenches and vias of damascene interconnect structures.
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