发明授权
US07496126B2 Gas laser oscillator and method of measuring laser gas replacement amount
有权
气体激光振荡器及测量激光气体更换量的方法
- 专利标题: Gas laser oscillator and method of measuring laser gas replacement amount
- 专利标题(中): 气体激光振荡器及测量激光气体更换量的方法
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申请号: US11700768申请日: 2007-02-01
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公开(公告)号: US07496126B2公开(公告)日: 2009-02-24
- 发明人: Yoshitaka Kubo , Toshiyasu Shiomi , Akira Egawa , Kazuhiro Suzuki
- 申请人: Yoshitaka Kubo , Toshiyasu Shiomi , Akira Egawa , Kazuhiro Suzuki
- 申请人地址: JP Minamitsuru-gun, Yamanashi
- 专利权人: Fanuc Ltd
- 当前专利权人: Fanuc Ltd
- 当前专利权人地址: JP Minamitsuru-gun, Yamanashi
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2006-025499 20060202
- 主分类号: H01S3/22
- IPC分类号: H01S3/22
摘要:
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.
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