发明授权
US07496126B2 Gas laser oscillator and method of measuring laser gas replacement amount 有权
气体激光振荡器及测量激光气体更换量的方法

Gas laser oscillator and method of measuring laser gas replacement amount
摘要:
A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.
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