公开(公告)号：US20070177649A1

公开(公告)日：2007-08-02

申请号：US11700768

申请日：2007-02-01

申请人： Yoshitaka Kubo ,  Toshiyasu Shiomi ,  Akira Egawa ,  Kazuhiro Suzuki

发明人： Yoshitaka Kubo ,  Toshiyasu Shiomi ,  Akira Egawa ,  Kazuhiro Suzuki

IPC分类号： H01S3/223 ,  H01S3/22

CPC分类号： H01S3/036 ,  H01S3/10069 ,  H01S3/104

摘要： A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.

摘要翻译： 气体激光振荡器包括用于调节对气室的激光气体供应的供给侧阀，用于调节来自气室的激光气体排出的排气侧阀，用于测量气室中的压力的​​气体压力测量装置 以及用作激光气体置换测量装置的控制装置。 控制装置在气室的抽真空或吹扫期间，以预定的时间间隔，通过气体压力测量装置对气室中的压力进行第一次测量和第二次测量，并且确定每单位时间内的激光气体替换量 激光振荡操作，基于第一和第二测量的结果。

公开(公告)号：US07496126B2

公开(公告)日：2009-02-24

申请号：US11700768

申请日：2007-02-01

申请人： Yoshitaka Kubo ,  Toshiyasu Shiomi ,  Akira Egawa ,  Kazuhiro Suzuki

发明人： Yoshitaka Kubo ,  Toshiyasu Shiomi ,  Akira Egawa ,  Kazuhiro Suzuki

IPC分类号： H01S3/22

CPC分类号： H01S3/036 ,  H01S3/10069 ,  H01S3/104

摘要： A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.

摘要翻译： 气体激光振荡器包括用于调节对气室的激光气体供应的供给侧阀，用于调节来自气室的激光气体排出的排气侧阀，用于测量气室中的压力的​​气体压力测量装置 以及用作激光气体置换测量装置的控制装置。 控制装置在气室的抽真空或吹扫期间，以预定的时间间隔，通过气体压力测量装置对气室中的压力进行第一次测量和第二次测量，并且确定每单位时间内的激光气体替换量 激光振荡操作，基于第一和第二测量的结果。