发明授权
US07501222B2 Photoresist monomer polymer thereof and photoresist composition including the same
失效
其光致抗蚀剂单体聚合物和包含其的光致抗蚀剂组合物
- 专利标题: Photoresist monomer polymer thereof and photoresist composition including the same
- 专利标题(中): 其光致抗蚀剂单体聚合物和包含其的光致抗蚀剂组合物
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申请号: US11471838申请日: 2006-06-21
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公开(公告)号: US07501222B2公开(公告)日: 2009-03-10
- 发明人: Jung-Youl Lee , Jae-Woo Lee , Jae-Hyun Kim
- 申请人: Jung-Youl Lee , Jae-Woo Lee , Jae-Hyun Kim
- 申请人地址: KR
- 专利权人: Dongjin Semichem Co., Ltd.
- 当前专利权人: Dongjin Semichem Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Park & Associates IP Law LLC
- 优先权: KR10-2005-0055190 20050624; KR10-2005-0074435 20050812
- 主分类号: G03C1/73
- IPC分类号: G03C1/73 ; G03F7/039 ; G03F7/20 ; G03F7/30
摘要:
A polymer including a monomer represented by the following Formula and a photoresist composition including the same are disclosed. The polymer and photoresist composition can improve the resolution and the process margin due to the low activation energy of the deprotection reaction of the alcohol ester group including saturated cyclic hydrocarbyl group, and also can produce fine photoresist patterns because they have a stable PEB(Post Exposure Baking) temperature sensitivity, and further, can improve the focus depth margin and the line edge roughness of the resist layer. In the above Formula, R* is a hydrogen or methyl group, R1 is saturated hydrocarbyl group of 1 to 5 carbon atoms, R is mono-cyclic or multi-cyclic homo or hetero saturated hydrocarbyl group of 3 to 50 carbon atoms, and n is an integer of at least 2.
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