发明授权
- 专利标题： Apparatuses and methods for suppressing thermally-induced motion of a workpiece
- 专利标题（中）： 用于抑制工件的热致运动的装置和方法
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申请号： US11018388申请日： 2004-12-20
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公开(公告)号： US07501607B2公开(公告)日： 2009-03-10
- 发明人: David Malcolm Camm , Mladen Bumbulovic , Joseph Cibere , J. Kiefer Elliott , Steve McCoy , Greg Stuart
- 申请人： David Malcolm Camm , Mladen Bumbulovic , Joseph Cibere , J. Kiefer Elliott , Steve McCoy , Greg Stuart
- 申请人地址： CA Vancouver
- 专利权人： Mattson Technology Canada, Inc.
- 当前专利权人： Mattson Technology Canada, Inc.
- 当前专利权人地址： CA Vancouver
- 代理机构： Knobbe, Martens, Olson & Bear LLP
- 主分类号： H05B6/80
- IPC分类号： H05B6/80
摘要：
Apparatuses and methods for suppressing thermally induced motion of a workpiece. An apparatus includes a workpiece heating system configured to thermally induce motion of a workpiece, and further includes a damping member spaced apart from the workpiece and configured to apply a damping force to dampen the motion of the workpiece. The damping member may be spaced apart from a rest position of the workpiece by a distance sufficiently small that gas pressure between the damping member and the workpiece opposes the motion of the workpiece. The distance is preferably adjustable.
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