发明授权
US07501674B2 Semiconductor device having fin transistor and planar transistor and associated methods of manufacture
有权
具有鳍式晶体管和平面晶体管的半导体器件及其制造方法
- 专利标题: Semiconductor device having fin transistor and planar transistor and associated methods of manufacture
- 专利标题(中): 具有鳍式晶体管和平面晶体管的半导体器件及其制造方法
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申请号: US11244136申请日: 2005-10-06
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公开(公告)号: US07501674B2公开(公告)日: 2009-03-10
- 发明人: Deok-Hyung Lee , Yu-Gyun Shin , Jong-Wook Lee , Min-Gu Kang
- 申请人: Deok-Hyung Lee , Yu-Gyun Shin , Jong-Wook Lee , Min-Gu Kang
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2004-0083691 20041019
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Disclosed is a fin transistor and a planar transistor and a method of forming the same. The fin transistor and the planar transistor are formed to have gate electrodes with similar thicknesses by selectively recessing a semiconductor substrate in a planar region where the planar transistor is formed.