发明授权
- 专利标题: Method of fabricating a high quantum efficiency photodiode
- 专利标题(中): 制造高量子效率光电二极管的方法
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申请号: US11360750申请日: 2006-02-23
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公开(公告)号: US07507596B2公开(公告)日: 2009-03-24
- 发明人: Dun-Nian Yaung , Shou-Gwo Wuu , Ho-Ching Chen , Chien-Hsien Tseng , Jeng-Shyan Lin
- 申请人: Dun-Nian Yaung , Shou-Gwo Wuu , Ho-Ching Chen , Chien-Hsien Tseng , Jeng-Shyan Lin
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Thomas, Kayden, Horstemeyer & Risley
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The present invention is CMOS image sensor and its method of fabrication. This invention provides an efficient structure to improve the quantum efficiency of a CMOS image sensor with borderless contact. The image sensor comprises a N-well/P-substrate type photodiode with borderless contact and dielectric structure covering the photodiode region. The dielectric structure is located between the photodiode and the interlevel dielectric (ILD) and is used as a buffer layer for the borderless contact. The method of fabricating a high performance photodiode comprises forming a photodiode in the n-well region of a shallow trench, and embedding a dielectric material between the ILD oxide and the photodiode having a refraction index higher than the ILD oxide.
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