Invention Grant
- Patent Title: Scanning electron microscope
- Patent Title (中): 扫描电子显微镜
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Application No.: US11230642Application Date: 2005-09-21
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Publication No.: US07511271B2Publication Date: 2009-03-31
- Inventor: Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
- Applicant: Michio Hatano , Sukehiro Ito , Shinichi Tomita , Junichi Katane
- Applicant Address: JP Ibaraki-ken
- Assignee: Hitachi Science Systems, Ltd.
- Current Assignee: Hitachi Science Systems, Ltd.
- Current Assignee Address: JP Ibaraki-ken
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2005-041534 20050218
- Main IPC: H01J47/00
- IPC: H01J47/00
Abstract:
A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
Public/Granted literature
- US20060186337A1 Scanning electron microscope Public/Granted day:2006-08-24
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