发明授权
US07513920B2 Free radical-forming activator attached to solid and used to enhance CMP formulations
有权
自由基形成活化剂连接到固体上并用于增强CMP配方
- 专利标题: Free radical-forming activator attached to solid and used to enhance CMP formulations
- 专利标题(中): 自由基形成活化剂连接到固体上并用于增强CMP配方
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申请号: US11264027申请日: 2005-11-02
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公开(公告)号: US07513920B2公开(公告)日: 2009-04-07
- 发明人: Junaid Ahmed Siddiqui , Robert J. Small , Daniel Hernandez Castillo
- 申请人: Junaid Ahmed Siddiqui , Robert J. Small , Daniel Hernandez Castillo
- 申请人地址: US AZ Tempe
- 专利权人: DuPont Air Products NanoMaterials LLC
- 当前专利权人: DuPont Air Products NanoMaterials LLC
- 当前专利权人地址: US AZ Tempe
- 代理机构: Morgan Lewis & Bockius LLP
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; C09G1/04
摘要:
A CMP composition having: a fluid comprising water and at least one oxidizing compound that produces free radicals when contacted with an activator; and a plurality of particles having a surface and comprising at least one activator selected from ions or compounds of Cu, Fe, Mn, Ti, or mixtures thereof disposed on said surface, wherein at least a portion of said surface comprises a stabilizer. Preferred activators are selected from inorganic oxygen-containing compounds of B, W, Al, and P, for example borate, tungstate, aluminate, and phosphate. The activators are preferably ions of Cu or Fe. Surprisingly, as little as 0.2 ppm and 12 ppm of activator is useful, if the activator-containing particles are suspended in the fluid as a slurry. Advantageously, certain organic acids, and especially dihydroxy enolic acids, are included in an amount less than about 4000 ppm. Advantageously, activator is coated onto abrasive particles after the particles have been coated with stabilizer.
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