发明授权
- 专利标题: Mapping-data analyzing method and apparatus
- 专利标题(中): 映射数据分析方法和装置
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申请号: US11256896申请日: 2005-10-24
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公开(公告)号: US07515769B2公开(公告)日: 2009-04-07
- 发明人: Kenichi Akao , Toshiyuki Nagoshi
- 申请人: Kenichi Akao , Toshiyuki Nagoshi
- 申请人地址: JP Hachioji-shi, Tokyo
- 专利权人: Jasco Corporation
- 当前专利权人: Jasco Corporation
- 当前专利权人地址: JP Hachioji-shi, Tokyo
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: JP2004-309447 20041025
- 主分类号: G06K9/36
- IPC分类号: G06K9/36
摘要:
It is an object of the present invention to provide a mapping-data analyzing method that can display a map in which sufficient information is extracted from the spectra of obtained mapping data to enable objective analysis. The mapping-data analyzing method of the present invention is used for analyzing mapping data obtained by measuring, with a spectrometer apparatus, spectra at a plurality of points on a specimen surface. The method comprises a principal-component calculating step and a grouped-map display step. In the principal-component calculating step, spectral data obtained at each point on the specimen surface is defined as an individual sample and principal component analysis, in which values at a plurality of wave numbers of each spectral data set serve as variables, is performed to calculate the scores of a plurality of principal components for each individual sample. In the grouped-map display step, the points on the specimen surface are divided into a plurality of groups based on the scores of a plurality of principal components calculated in the principal-component calculating step and a two-dimensional or three-dimensional map indicating to which group each point on the specimen surface belongs is displayed on a display device.
公开/授权文献
- US20060088217A1 Mapping-data analyzing method and apparatus 公开/授权日:2006-04-27
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