发明授权
- 专利标题： Magneto-optical recording medium and manufacturing method thereof
- 专利标题（中）： 磁光记录介质及其制造方法
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申请号： US10476628申请日： 2003-03-12
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公开(公告)号： US07517436B2公开(公告)日： 2009-04-14
- 发明人: Tetsuhiro Sakamoto , Kazutomo Miyata
- 申请人： Tetsuhiro Sakamoto , Kazutomo Miyata
- 申请人地址： JP Tokyo
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Rockey, Depke & Lyons, LLC
- 代理商 Robert J. Depke
- 优先权： JP2002-070375 20020314
- 国际申请： PCT/JP03/02910 WO 20030312
- 国际公布： WO03/077245 WO 20030918
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
In a manufacturing method of a magneto-optical recording medium formed by laminating a plurality of magnetic layers, there is provided a manufacturing method whereby at least two of the magnetic layers can be properly and individually formed by sputtering the same target means in the same vacuum vessel under different conditions at the time of a sputtering process in accordance with an element composition ratio and/or magnetic characteristics of each layer.
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