- 专利标题: Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system
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申请号: US11113630申请日: 2005-04-25
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公开(公告)号: US07517438B2公开(公告)日: 2009-04-14
- 发明人: Masahiro Shibamoto , Sinji Furukawa , Tetsuya Endoh , Miho Sakai , Naoki Watanabe
- 申请人: Masahiro Shibamoto , Sinji Furukawa , Tetsuya Endoh , Miho Sakai , Naoki Watanabe
- 申请人地址: JP Tokyo
- 专利权人: Canon Anelva Corporation
- 当前专利权人: Canon Anelva Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Hogan & Hartson LLP
- 优先权: JP2001-60979 20010305
- 主分类号: C23C14/34
- IPC分类号: C23C14/34
摘要:
This invention presents a magnetic recording disk where an anisotropy-allowing layer to allow magnetic anisotropy to a magnetic recording layer is provided between a substrate and the magnetic recording layer. This invention also presents a magnetic-recording-disk manufacturing method comprising a step to prepare an anisotropy-allowing layer to allow magnetic anisotropy to a magnetic recording layer, prior to a step to prepare the magnetic recording layer. This invention also presents a magnetic-recording-disk manufacturing system comprising an anisotropy-allowing-layer preparation chamber, in which an anisotropy-allowing layer to allow magnetic anisotropy to a magnetic recording layer is prepared on a substrate, prior to preparation of the magnetic recording layer. In this invention, the anisotropy-allowing layer is made of; nitride of niobium, tantalum, niobium alloy or tantalum alloy, or nitride-including niobium, tantalum, niobium alloy or tantalum alloy.
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