发明授权
- 专利标题: Photosensitive resin composition, photosensitive element, production method of resist pattern and production method for printed circuit board
- 专利标题(中): 光敏树脂组合物,感光元件,抗蚀剂图案的制造方法和印刷电路板的制造方法
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申请号: US10296911申请日: 2001-05-29
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公开(公告)号: US07517636B2公开(公告)日: 2009-04-14
- 发明人: Takahiro Fukaya , Masaki Endou , Takuji Abe , Katsutoshi Itagaki
- 申请人: Takahiro Fukaya , Masaki Endou , Takuji Abe , Katsutoshi Itagaki
- 申请人地址: JP Tokyo
- 专利权人: Hitachi Chemical Co., Ltd.
- 当前专利权人: Hitachi Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2000-157530 20000529; JP2000-395193 20001226
- 国际申请: PCT/JP01/04496 WO 20010529
- 国际公布: WO01/92958 WO 20011206
- 主分类号: G03F7/028
- IPC分类号: G03F7/028 ; G03F7/032 ; G03F7/20 ; G03F7/30 ; G03F7/36
摘要:
A photosensitive resin composition is here disclosed which satisfies the following (1) and (2): (1) when a 1.0 wt % aqueous sodium carbonate solution is sprayed by a spray on a layer of the photosensitive resin composition having a thickness of 37 to 42 μm under the following conditions, the photosensitive resin composition layer being able to be removed within 20 seconds, the above conditions being that an internal diameter of a nozzle of the spray is 1.2 mm, a spraying pressure is 0.05 MPa, and a distance between a point of the spray nozzle which is closest to the photosensitive resin composition layer and the photosensitive resin composition layer is 50 mm; and (2) when the 1.0 wt % aqueous sodium carbonate solution is sprayed three times for 36 seconds under the above conditions on a cured film obtained by laminating a layer of the photosensitive resin composition having the above thickness on a copper-clad laminate having 18 three-continuous holes in which 3 holes each having a diameter of 6 mm are continuously integrated and which has a length of 16 mm, and then photo-curing the layer with an exposure capable of curing 24 steps in a 41-step tablet, the number of holes where the cured film is broken being 5 or less.
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