Invention Grant
- Patent Title: Method of manufacturing transistor, method of manufacturing electro-optical device, and method of manufacturing electronic device
- Patent Title (中): 晶体管的制造方法,电光装置的制造方法以及电子装置的制造方法
-
Application No.: US11140748Application Date: 2005-06-01
-
Publication No.: US07521299B2Publication Date: 2009-04-21
- Inventor: Hideki Tanaka , Takashi Masuda , Ichio Yudasaka , Takashi Aoki
- Applicant: Hideki Tanaka , Takashi Masuda , Ichio Yudasaka , Takashi Aoki
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2004-165007 20040602; JP2004-240354 20040820
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
A method of manufacturing a transistor includes disposing a droplet containing a bank material as a solute or a dispersoid on a substrate, drying the droplet to form a bank, ejecting a conductive material on a part of the bank to form a first conductive region and a second conductive region with the part of the bank interposed therebetween, removing the bank to form a groove between the first and second conductive regions, supplying a semiconductor material into the groove to form a semiconductor film, forming a gate insulating film on the semiconductor film, and forming a gate electrode at a position on the gate insulating film facing the semiconductor film.
Public/Granted literature
Information query
IPC分类: