发明授权
US07525769B2 Micro-actuator having swing support to allow horizontal swinging movement of slider support
失效
微型致动器具有摆动支撑件，以允许滑块支撑件的水平摆动
- 专利标题： Micro-actuator having swing support to allow horizontal swinging movement of slider support
- 专利标题（中）： 微型致动器具有摆动支撑件，以允许滑块支撑件的水平摆动
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申请号： US10831954申请日： 2004-04-26
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公开(公告)号： US07525769B2公开(公告)日： 2009-04-28
- 发明人: Ming Gao Yao , Masashi Shiraishi
- 申请人： Ming Gao Yao , Masashi Shiraishi
- 申请人地址： HK Shatin, N.T.
- 专利权人： SAE Magnetics (H.K.) Ltd.
- 当前专利权人： SAE Magnetics (H.K.) Ltd.
- 当前专利权人地址： HK Shatin, N.T.
- 代理机构： Kenyon & Kenyon LLP
- 优先权： WOPCT/CN03/01007 20031127
- 主分类号： G11B21/10
- IPC分类号： G11B21/10 ; G11B21/24 ; G11B5/596
摘要：
A thin film piezoelectric (PZT) micro-actuator is disclosed. Two thin film pieces of PZT are couple to a slider support frame. The slider support frame has a slider support connected by a leading beam to a base. The two thin film pieces of PZT connect the slider support to the base. Applied voltage causes the thin film pieces of PZT to contract or expand, moving the slider support in relation to the base. The thin film pieces of PZT can be single or multiple layers. The thin film PZT micro-actuator can be coupled to the suspension by anisotropic conductive film, with the thin film pieces of PZT between the slider support frame and the suspension. Alternately, the thin film PZT micro-actuator can be coupled to the suspension with the thin film pieces of PZT exterior to the slider support frame and the suspension.
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