An optical waveguide device is disclosed which includes a semiconductor region, an optical waveguide provided between a first light confinement layer and a second light confinement layer formed in the semiconductor region, and at least one insulating film region formed in the semiconductor region and above at least one of an outside and an inside with respect to a curvature radius direction of the bent portion of the optical waveguide, wherein; the insulating film region is also used as an isolation region of a MOS device to be formed in the semiconductor region in which the insulating film region is formed.