Invention Grant
- Patent Title: CMOSFET with hybrid-strained channels
- Patent Title (中): 具有混合应变通道的CMOSFET
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Application No.: US11562522Application Date: 2006-11-22
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Publication No.: US07528044B2Publication Date: 2009-05-05
- Inventor: Wen Chin Lee
- Applicant: Wen Chin Lee
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L31/072 ; H01L31/109 ; H01L31/0328 ; H01L31/0336

Abstract:
Disclosed is a method of manufacturing microelectronic devices including forming a silicon substrate with first and second wells of different dopant characteristics, forming a first strained silicon-germanium-carbon layer of a first formulation proximate to the first well, and forming a second strained silicon-germanium-carbon layer of a second formulation distinct from the first formulation proximate to the second well. Capping and insulating layers, gate structures, spacers, and sources and drains are then formed, thereby creating a CMOS device with independently strained channels.
Public/Granted literature
- US20070093046A1 CMOSFET With Hybrid-Strained Channels Public/Granted day:2007-04-26
Information query
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