发明授权
US07530952B2 Capacitive ultrasonic transducers with isolation posts 有权
具有隔离柱的电容式超声换能器

Capacitive ultrasonic transducers with isolation posts
摘要:
A capacitive ultrasonic transducer is described which include one or more cells including a cavity defined by a membrane electrode supported spaced from a support electrode by insulating walls with a patterned isolation layer having isolation posts or areas located in said cavity to prevent the electrodes for coming into contact during operation of the transducer, and to minimize the accumulation of charge as compared to a non-patterned isolation layer for preventing contact of the electrodes during operation of the transducer.
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