发明授权
US07531824B1 High value inductor with conductor surrounded by high permeability polymer formed on a semiconductor substrate
有权
具有由半导体衬底上形成的高磁导率聚合物包围的导体的高值电感器
- 专利标题： High value inductor with conductor surrounded by high permeability polymer formed on a semiconductor substrate
- 专利标题（中）： 具有由半导体衬底上形成的高磁导率聚合物包围的导体的高值电感器
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申请号： US11274932申请日： 2005-11-14
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公开(公告)号： US07531824B1公开(公告)日： 2009-05-12
- 发明人: Peter Johnson , Peter J. Hopper , Kyuwoon Hwang , William French
- 申请人： Peter Johnson , Peter J. Hopper , Kyuwoon Hwang , William French
- 申请人地址： US CA Santa Clara
- 专利权人： National Semiconductor Corporation
- 当前专利权人： National Semiconductor Corporation
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Beyer Law Group LLP
- 主分类号： H01L29/02
- IPC分类号： H01L29/02
摘要：
An apparatus and method for fabricating high value inductors embedded on semiconductor integrated circuit. The apparatus and method involve forming a conductor on the semiconductor substrate. Once the conductor is formed, a polymer material is provided on the substrate surrounding the conductor. The polymer material contains a ferromagnetic material so that the permeability of the polymer is greater than one. In various embodiments, the ferromagnetic material may be any one of a number of different high permeable materials such as iron oxide, zinc, manganese, zirconium, samarium (SA), neodymium (NA), cobalt, nickel or a combination thereof.
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