发明授权
US07532322B2 Method and apparatus for measuring electron density of plasma and plasma processing apparatus 有权
用于测量等离子体和等离子体处理装置的电子密度的方法和装置

Method and apparatus for measuring electron density of plasma and plasma processing apparatus
摘要:
An apparatus for measuring plasma electron density precisely measures electron density in plasma even under a low electron density condition or high pressure condition. This plasma electron density measuring apparatus includes a vector network analyzer in a measuring unit, which measures a complex reflection coefficient and determines a frequency characteristic of an imaginary part of the coefficient. A resonance frequency at a point where the imaginary part of the complex reflection coefficient is zero-crossed is read and the electron density is calculated based on the resonance frequency by a measurement control unit.
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