发明授权
- 专利标题: Head of inkjet printer and method of manufacturing the same
- 专利标题(中): 喷墨打印机头及其制造方法
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申请号: US11237713申请日: 2005-09-29
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公开(公告)号: US07533971B2公开(公告)日: 2009-05-19
- 发明人: Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
- 申请人: Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Staas & Halsey LLP
- 优先权: KR2001-81530 20011220
- 主分类号: B41J2/05
- IPC分类号: B41J2/05
摘要:
A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.
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