公开(公告)号：US07533971B2

公开(公告)日：2009-05-19

申请号：US11237713

申请日：2005-09-29

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成SiO 2，因此喷嘴板和加热器基板以SiO 2的静电力结合。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。

公开(公告)号：US06974208B2

公开(公告)日：2005-12-13

申请号：US10321574

申请日：2002-12-18

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 SiO 2由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成，因此喷嘴板和加热器基板以静电力的SiO 2 。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。

公开(公告)号：US20060023028A1

公开(公告)日：2006-02-02

申请号：US11237713

申请日：2005-09-29

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J2/04

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 SiO 2由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成，因此喷嘴板和加热器基板以静电力的SiO 2 。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。

公开(公告)号：US06702428B2

公开(公告)日：2004-03-09

申请号：US10268083

申请日：2002-10-10

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-cheol Ko ,  Jae-sik Min ,  Kyong-il Kim ,  Byung-ha Park ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-cheol Ko ,  Jae-sik Min ,  Kyong-il Kim ,  Byung-ha Park ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J205

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645

摘要： A bubble-jet type ink-jet printhead has a structure in which a base plate, a barrier wall, and a nozzle plate are stacked. The base plate includes a substrate on which a recess is formed to a predetermined depth, an adiabatic layer formed on the substrate, a heater which is formed on the adiabatic layer and generates a thermal energy, and a passivation layer which is formed on the heater and passivates the heater. The barrier wall is stacked on the base plate, defines an ink chamber, which is disposed on the recess and has a recessed bottom surface, and defines an ink passage which communicates with the ink chamber. The nozzle plate is stacked on the barrier wall, has nozzles through which ink is ejected, and is formed at a location corresponding to a center of the ink chamber. Since a height of the barrier wall surrounding the ink chamber is reduced by the recess, delamination caused by ink soaked into the barrier wall can be prevented, and print performances such as a traveling property in a straight direction of ink droplets and ejection velocity of ink droplets, are improved.

摘要翻译： 气泡喷墨式喷墨打印头具有堆叠基板，阻挡壁和喷嘴板的结构。 基板包括基板，其上形成有预定深度的凹部，在基板上形成的绝热层，形成在绝热层上并产生热能的加热器，以及形成在加热器上的钝化层 并加热加热器。 阻挡壁堆叠在基板上，限定了一个墨水室，它设置在凹槽上并具有凹入的底面，并且限定了与墨水室连通的墨水通道。 喷嘴板堆叠在阻挡壁上，具有喷嘴，墨通过喷嘴喷射，并且形成在与墨水室的中心对应的位置。 由于凹部围绕墨水室的阻挡壁的高度被凹部减小，因此能够防止由墨水浸透到阻挡壁中的墨分层，并且墨滴直线方向的行进特性和墨滴的喷射速度等打印性能 液滴，改进。

公开(公告)号：US07341332B2

公开(公告)日：2008-03-11

申请号：US10268726

申请日：2002-10-11

申请人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

发明人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

IPC分类号： B41J2/04

CPC分类号： B41J2/1646 ,  B41J2/14 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14346

摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.

公开(公告)号：US06595627B2

公开(公告)日：2003-07-22

申请号：US10197819

申请日：2002-07-19

申请人： Jae-sik Min ,  Myung-song Jung ,  Sung-joon Park ,  Seo-hyun Cho

发明人： Jae-sik Min ,  Myung-song Jung ,  Sung-joon Park ,  Seo-hyun Cho

IPC分类号： B41J205

CPC分类号： B41J2/14137 ,  B41J2/14072 ,  B41J2/14145 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/1437 ,  B41J2002/14467

摘要： An inkjet printhead and a manufacturing method thereof. The inkjet printhead includes a substrate, a substantially cylindrical ink chamber storing ink and formed in an upper portion of the substrate, and a manifold supplying ink to the ink chamber in a bottom portion of the substrate, a channel-forming layer disposed between the ink chamber and the manifold and having an ink channel communicating between the ink chamber and the manifold, a nozzle plate stacked on the substrate and having a nozzle at a location corresponding to the central part of the ink chamber, a heater formed to surround the nozzle of the nozzle plate, and electrodes electrically connected to the heater to supply current to the heater. Therefore, the quantity of ink stored in an ink chamber can be increased. Also, when bubbles grow, the cylindrical ink chamber confines an ink flow area to ink ejectors, thereby reducing a back flow of the ink. Further, the quantity of ink supplied to the ink chamber can be adjusted by varying the number of ink channels formed in the channel-forming layer, thereby improving frequency characteristics of the inkjet printhead.

公开(公告)号：US07758165B2

公开(公告)日：2010-07-20

申请号：US12000579

申请日：2007-12-13

申请人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

发明人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

IPC分类号： B41J2/04

CPC分类号： B41J2/1646 ,  B41J2/14 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14346

摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.

摘要翻译： 喷墨打印头及其制造方法包括：基板，其上形成有空间部分，安装在基板上的通道板，其中形成有用于存储墨水的墨水室;喷嘴板，安装在通道的顶表面 其中形成有喷嘴以喷射墨水的板;以及设置在基板和通道板之间的振动板，以通过改变墨水室的体积产生用于喷射墨水的压力。 所述振动板包括形成在所述基板的顶面的基底层，以覆盖所述空间部分的至少一部分;薄膜形状记忆合金层，其与容纳在所述墨水室中的墨水接触并根据温度变化 设置在基底层和薄膜形状记忆合金之间以产生热量的加热元件，以及设置在加热元件和薄膜形状记忆合金层之间的绝缘层，并将由加热元件产生的热量传递到薄 薄膜形状记忆合金层。 由于加热元件的稳定的电阻温度系数（TCR），可以容易地控制供给到热元件的电压的高度和宽度，从而可以精确地控制振动板的功率，从而具有预定的 图像质量，并且加热元件不直接接触墨水，从而实现喷墨打印头的稳定性。

公开(公告)号：US06964743B2

公开(公告)日：2005-11-15

申请号：US10388622

申请日：2003-03-17

申请人： Jae-sik Min ,  Myung-song Jung ,  Sung-joon Park ,  Seo-hyun Cho

发明人： Jae-sik Min ,  Myung-song Jung ,  Sung-joon Park ,  Seo-hyun Cho

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/14137 ,  B41J2/14072 ,  B41J2/14145 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/1437 ,  B41J2002/14467

摘要： An inkjet printhead and a manufacturing method thereof. The inkjet printhead includes a substrate, a substantially cylindrical ink chamber storing ink and formed in an upper portion of the substrate, and a manifold supplying ink to the ink chamber in a bottom portion of the substrate, a channel-forming layer disposed between the ink chamber and the manifold and having an ink channel communicating between the ink chamber and the manifold, a nozzle plate stacked on the substrate and having a nozzle at a location corresponding to the central part of the ink chamber, a heater formed to surround the nozzle of the nozzle plate, and electrodes electrically connected to the heater to supply current to the heater. Therefore, the quantity of ink stored in an ink chamber can be increased. Also, when bubbles grow, the cylindrical ink chamber confines an ink flow area to ink ejectors, thereby reducing a back flow of the ink. Further, the quantity of ink supplied to the ink chamber can be adjusted by varying the number of ink channels formed in the channel-forming layer, thereby improving frequency characteristics of the inkjet printhead.

摘要翻译： 喷墨打印头及其制造方法。 喷墨打印头包括基板，存储油墨并形成在基板的上部的基本圆柱形的油墨室，以及向基板底部的墨水室供墨的歧管，设置在墨水之间的通道形成层 并且具有在墨水室和歧管之间连通的墨水通道，在基板上堆叠的喷嘴板，并且在对应于墨水腔的中心部分的位置处具有喷嘴，加热器形成为围绕喷嘴的喷嘴 喷嘴板和电连接到加热器以向加热器提供电流的电极。 因此，可以增加存储在墨室中的墨的量。 此外，当气泡生长时，圆筒形墨水室将墨水流动区域限制到墨水喷射器，从而减少墨水的回流。 此外，可以通过改变在通道形成层中形成的墨水通道的数量来调节供应到墨水室的墨水量，从而改善喷墨打印头的频率特性。

公开(公告)号：US20080096296A1

公开(公告)日：2008-04-24

申请号：US12000579

申请日：2007-12-13

申请人： Myung-song Jung ,  Sung-Jeon Park ,  Tae-Kyun Kim ,  Jae-sik Min

发明人： Myung-song Jung ,  Sung-Jeon Park ,  Tae-Kyun Kim ,  Jae-sik Min

IPC分类号： H01L21/00 ,  B41J2/05

CPC分类号： B41J2/1646 ,  B41J2/14 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14346

摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.

摘要翻译： 喷墨打印头及其制造方法包括：基板，其上形成有空间部分，安装在基板上的通道板，其中形成有用于存储墨水的墨水室;喷嘴板，安装在通道的顶表面 其中形成有喷嘴以喷射墨水的板;以及设置在基板和通道板之间的振动板，以通过改变墨水室的体积产生用于喷射墨水的压力。 所述振动板包括形成在所述基板的顶面的基底层，以覆盖所述空间部分的至少一部分;薄膜形状记忆合金层，其与容纳在所述墨水室中的墨水接触并根据温度变化 设置在基底层和薄膜形状记忆合金之间以产生热量的加热元件，以及设置在加热元件和薄膜形状记忆合金层之间的绝缘层，并将由加热元件产生的热量传递到薄 薄膜形状记忆合金层。 由于加热元件的稳定的电阻温度系数（TCR），可以容易地控制供给到热元件的电压的高度和宽度，从而可以精确地控制振动板的功率，从而具有预定的 图像质量，并且加热元件不直接接触墨水，从而实现喷墨打印头的稳定性。

公开(公告)号：US06880919B2

公开(公告)日：2005-04-19

申请号：US10404423

申请日：2003-04-02

申请人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

发明人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

IPC分类号： B41J2/05 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  B41J2/315

CPC分类号： B41J2/1645 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1437

摘要： An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

摘要翻译： 喷墨打印头包括其上形成有墨水室的基板和用于覆盖墨水室的喷嘴板，具有喷嘴，墨滴通过喷嘴从墨水室喷出，并且由多层 绝缘层。 喷墨打印头还包括埋在喷嘴板中以围绕喷嘴的加热器，埋在喷嘴板中以电连接到加热器的互连层，以及在喷嘴板上由光致抗蚀剂形成的涂层，并且具有通孔 型液滴引导件连接到喷嘴板的喷嘴。 液滴引导件通过具有足够厚度的涂层形成，并且能够快速恢复和稳定墨水的弯液面，并且以高速和高频喷射墨滴。 此外，喷墨打印头具有改善的耐磨性和耐化学性。