发明授权
US07534466B2 Methods and equipment for depositing coatings having sequenced structures 有权
用于沉积具有测序结构的涂层的方法和设备

Methods and equipment for depositing coatings having sequenced structures
摘要:
Methods and equipment are provided for processing sheet-like substrates. The methods and equipment are useful for depositing coatings on both major surfaces of a sheet-like substrate. Also provided are substrates with coatings on both major surfaces. Preferably, the coatings on the opposed major surfaces of a substrate have different structures, yet share a common structural sequence of at least two film regions, and in some embodiments at least three film regions.
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