Invention Grant
- Patent Title: CMOS image sensor and method for fabricating the same
- Patent Title (中): CMOS图像传感器及其制造方法
-
Application No.: US11448496Application Date: 2006-06-07
-
Publication No.: US07534643B2Publication Date: 2009-05-19
- Inventor: Chang Hun Han
- Applicant: Chang Hun Han
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Saliwanchik
- Priority: KR10-2005-0048482 20050607
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a CMOS image sensor includes: forming a gate electrode on a pixel region of the semiconductor substrate and, at the same time, forming a polysilicon pattern on a middle resistor region; forming a first lightly doped n-type diffusion region on the photodiode region; forming a second lightly doped n-type diffusion region on the transistor region; consecutively forming first and second insulating layers on the entire surface of the semiconductor substrate; removing a predetermined portion of the second insulation layer on the transistor region and the middle resistor region; forming a third insulation layer on the entire surface of the semiconductor substrate; forming sidewalls of the first insulating layer and the third insulating layer on the gate electrode and the polysilicon pattern by performing an etch-back process; and heavily doping n-type impurities in the transistor region and the polysilicon pattern.
Public/Granted literature
- US20060273321A1 CMOS image sensor and method for fabricating the same Public/Granted day:2006-12-07
Information query
IPC分类: