Invention Grant
US07535074B2 Monolithically integrated vertical pin photodiode used in biCMOS technology
有权
用于biCMOS技术的单片集成垂直引脚光电二极管
- Patent Title: Monolithically integrated vertical pin photodiode used in biCMOS technology
- Patent Title (中): 用于biCMOS技术的单片集成垂直引脚光电二极管
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Application No.: US10534304Application Date: 2003-11-12
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Publication No.: US07535074B2Publication Date: 2009-05-19
- Inventor: Wolfgang Einbrodt , Horst Zimmermann , Michael Foertsch
- Applicant: Wolfgang Einbrodt , Horst Zimmermann , Michael Foertsch
- Applicant Address: DE Erfurt
- Assignee: X-Fab Semiconductor Foundries AG
- Current Assignee: X-Fab Semiconductor Foundries AG
- Current Assignee Address: DE Erfurt
- Agency: Duane Morris LLP
- Priority: DE10252878 20021112
- International Application: PCT/DE03/03739 WO 20031112
- International Announcement: WO2004/044994 WO 20040527
- Main IPC: H01L29/868
- IPC: H01L29/868

Abstract:
The invention relates to a monolithically integrated vertical pin photodiode which is produced according to BiCMOS technology and comprises a planar surface facing the light and a rear face and anode connections located across p areas on a top face of the photodiode. An i-zone of the pin photodiode is formed by combining a low doped first p-epitaxial layer, which has maximum thickness and doping concentration, placed upon a particularly high doped p substrate, with a low doped second n− epitaxial layer that borders the first layer, and n+ cathode of the pin photodiode being integrated into the second layer. The p areas delimit the second n epitaxial layer in a latent direction while another anode connecting area of the pin diode is provided on the rear face in addition to the anode connection.
Public/Granted literature
- US20070018268A1 Monolithically integrated vertical pin photodiode used in bicmos technology Public/Granted day:2007-01-25
Information query
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