发明授权
- 专利标题: Laser beam processing machine
- 专利标题(中): 激光束加工机
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申请号: US11808384申请日: 2007-06-08
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公开(公告)号: US07538048B2公开(公告)日: 2009-05-26
- 发明人: Satoshi Kobayashi , Keiji Nomaru , Yosuke Watanabe
- 申请人: Satoshi Kobayashi , Keiji Nomaru , Yosuke Watanabe
- 申请人地址: JP Tokyo
- 专利权人: Disco Corporation
- 当前专利权人: Disco Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2004-294743 20041007
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A laser beam processing machine comprising a path distribution means for distributing a pulse laser beam oscillated by pulse laser beam oscillation means to a first path and a second path alternately, and one laser beam that passes through one of the paths and is converged by one condensing lens and the other laser beam that passes through the other path and is converged by the condensing lens are applied at different focusing points which have been displaced from each other in the direction of the optical axis, alternately with a time lag between them.
公开/授权文献
- US20070243696A1 Laser beam processing machine 公开/授权日:2007-10-18
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