发明授权
US07541256B2 Method of fabricating back-illuminated imaging sensors using a bump bonding technique
有权
使用凸块接合技术制造背照式成像传感器的方法
- 专利标题: Method of fabricating back-illuminated imaging sensors using a bump bonding technique
- 专利标题(中): 使用凸块接合技术制造背照式成像传感器的方法
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申请号: US11779414申请日: 2007-07-18
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公开(公告)号: US07541256B2公开(公告)日: 2009-06-02
- 发明人: Pradyumna Kumar Swain , Peter Levine , Mahalingam Bhaskaran , Norman Goldsmith
- 申请人: Pradyumna Kumar Swain , Peter Levine , Mahalingam Bhaskaran , Norman Goldsmith
- 申请人地址: US NJ Princeton
- 专利权人: Sarnoff Corporation
- 当前专利权人: Sarnoff Corporation
- 当前专利权人地址: US NJ Princeton
- 代理机构: Lowenstein Sandler PC
- 主分类号: H01L21/76
- IPC分类号: H01L21/76
摘要:
A method for fabricating a back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate, and resulting imaging device is disclosed. The method for manufacturing the imaging device includes the steps of providing a substrate comprising an insulator layer, and an epitaxial layer substantially overlying the insulator layer; fabricating at least one imaging component at least partially overlying and extending into the epitaxial layer; forming a plurality of bond pads substantially overlying the epitaxial layer; fabricating a dielectric layer substantially overlying the epitaxial layer and the at least one imaging component; providing a handle wafer; forming a plurality of conductive trenches in the handle wafer; forming a plurality of conductive bumps on a first surface of the handle wafer substantially underlying the conductive trenches; and bonding the plurality of conductive bumps to the plurality of bond pads.
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