发明授权
US07545505B2 Device and method for a combined interferometry and image-based determination of geometry, especially for use in micro system engineering 有权
用于组合干涉测量和基于图像的几何测定的装置和方法,特别是用于微系统工程

  • 专利标题: Device and method for a combined interferometry and image-based determination of geometry, especially for use in micro system engineering
  • 专利标题(中): 用于组合干涉测量和基于图像的几何测定的装置和方法,特别是用于微系统工程
  • 申请号: US11585621
    申请日: 2006-10-24
  • 公开(公告)号: US07545505B2
    公开(公告)日: 2009-06-09
  • 发明人: Peter LehmannNorbert Steffens
  • 申请人: Peter LehmannNorbert Steffens
  • 申请人地址: DE Göttingen
  • 专利权人: Carl Mahr Holding GmbH
  • 当前专利权人: Carl Mahr Holding GmbH
  • 当前专利权人地址: DE Göttingen
  • 代理商 R. S. Lombard; K. Bach
  • 优先权: DE102004022341 20040504
  • 主分类号: G01B9/02
  • IPC分类号: G01B9/02
Device and method for a combined interferometry and image-based determination of geometry, especially for use in micro system engineering
摘要:
The apparatus according to the invention comprises an object lens which can operate in at least two different measuring modes. In a first, interference mode a workpiece is measured by means of interference optometry. In a second, imaging measuring mode an optical image is produced, for example, on a camera-like detector array and may be applied to an image processing routine. Switching between the two measuring modes is performed by the type of illumination of the object lens and an element which is disposed preferably in the reference beam path of an interferometer and which activates or deactivates the reference beam path dependent on the spectral composition of the utilized light. In this manner a simple and rapid changeover between the two measuring modes is provided, without the need for replacing or even for moving the object lens. Apart from the rapidity of changeover, a good correlation is achieved between the measuring data which are yielded by the interferometry and by the image processing and which are obtained in one and the same reference coordinate system.
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