公开(公告)号：US08072608B2

公开(公告)日：2011-12-06

申请号：US12290063

申请日：2008-10-27

申请人： Norbert Steffens ,  Peter Lehmann

发明人： Norbert Steffens ,  Peter Lehmann

IPC分类号： G01B9/02

CPC分类号： G01B11/2441 ,  G01B9/04

摘要： The apparatus and method according to the invention includes an objective (8) which is capable of operating basically in two different measuring modes. In a first interference mode, a measuring object (9) is interference—optically measured. In a second imaging operating mode on a detector array (12) designed like a camera, an optical image is generated, which is supplied to an image processing routine. The switching over between the two operating modes occurs by switching the illumination devices which are associated with different locations of the beam path of the apparatus—when viewed from the camera, one in front of a beam divider and the other behind the beam divider, which couples a reference light path to the beam path.

摘要翻译： 根据本发明的装置和方法包括能够基本上以两种不同测量模式操作的目标（8）。 在第一干涉模式中，测量对象（9）被干涉光学测量。 在像照相机那样设计的检测器阵列（12）上的第二成像操作模式中，生成光学图像，该图像被提供给图像处理程序。 在两个操作模式之间切换通过切换与设备的光束路径的不同位置相关联的照明装置 - 当从照相机观察时，其中一个在分束器前面，另一个在分束器之后，其中 将参考光路耦合到光束路径。

公开(公告)号：US20100157288A1

公开(公告)日：2010-06-24

申请号：US12589250

申请日：2009-10-20

申请人： Frank Brossette ,  Norbert Steffens

发明人： Frank Brossette ,  Norbert Steffens

IPC分类号： G01N21/00

CPC分类号： G01B5/012 ,  G01B11/007

摘要： In a modular measuring head system comprising a central module having the shape of a parallelepiped block with six sides, the central module encloses an interior space and is provided on at least five sides with attachment sites, each having at least one opening leading to the interior space. Together with additional modules, the central module forms a modular building structure based on a highly diverse optical measuring head including at least several of an illumination module, a lens module, a mirror module and a camera module. Each of these optional modules can be at least indirectly attached to at least one of the attachment sites.

摘要翻译： 在包括具有六边形的平行六面体块形状的中央模块的模块化测量头系统中，中心模块包围内部空间，并且在至少五个侧面上设置有附接位置，每个具有至少一个通向内部的开口 空间。 与附加模块一起，中央模块基于包括照明模块，透镜模块，镜模块和相机模块中的至少几个的高度多样化的光学测量头形成模块化建筑结构。 这些可选模块中的每一个可以至少间接地附接到至少一个附接位置。

公开(公告)号：US20090059208A1

公开(公告)日：2009-03-05

申请号：US12290063

申请日：2008-10-27

申请人： Norbert Steffens ,  Peter Lehmann

发明人： Norbert Steffens ,  Peter Lehmann

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01B9/04

摘要： The apparatus and method according to the invention includes an objective (8) which is capable of operating basically in two different measuring modes. In a first interference mode, a measuring object (9) is interference—optically measured. In a second imaging operating mode on a detector array (12) designed like a camera, an optical image is generated, which is supplied to an image processing routine. The switching over between the two operating modes occurs by switching the illumination devices which are associated with different locations of the beam path of the apparatus—when viewed from the camera, one in front of a beam divider and the other behind the beam divider, which couples a reference light path to the beam path.

摘要翻译： 根据本发明的装置和方法包括能够基本上以两种不同测量模式操作的目标（8）。 在第一干涉模式中，测量对象（9）被干涉光学测量。 在像照相机那样设计的检测器阵列（12）上的第二成像操作模式中，生成光学图像，该图像被提供给图像处理程序。 在两个操作模式之间切换通过切换与设备的光束路径的不同位置相关联的照明装置 - 当从照相机观察时，其中一个在分束器前面，另一个在分束器之后，其中 将参考光路耦合到光束路径。

公开(公告)号：US08174684B2

公开(公告)日：2012-05-08

申请号：US12589250

申请日：2009-10-20

申请人： Frank Brossette ,  Norbert Steffens

发明人： Frank Brossette ,  Norbert Steffens

IPC分类号： G01N21/00

CPC分类号： G01B5/012 ,  G01B11/007

摘要： In a modular measuring head system comprising a central module having the shape of a parallelepiped block with six sides, the central module encloses an interior space and is provided on at least five sides with attachment sites, each having at least one opening leading to the interior space. Together with additional modules, the central module forms a modular building structure based on a highly diverse optical measuring head including at least several of an illumination module, a lens module, a mirror module and a camera module. Each of these optional modules can be at least indirectly attached to at least one of the attachment sites.

摘要翻译： 在包括具有六边形的平行六面体块形状的中央模块的模块化测量头系统中，中心模块包围内部空间，并且在至少五个侧面上设置有附接位置，每个具有至少一个通向内部的开口 空间。 与附加模块一起，中央模块基于包括照明模块，透镜模块，镜模块和相机模块中的至少几个的高度多样化的光学测量头形成模块化建筑结构。 这些可选模块中的每一个可以至少间接地附接到至少一个附接位置。

公开(公告)号：US07545505B2

公开(公告)日：2009-06-09

申请号：US11585621

申请日：2006-10-24

申请人： Peter Lehmann ,  Norbert Steffens

发明人： Peter Lehmann ,  Norbert Steffens

IPC分类号： G01B9/02

CPC分类号： G01B9/04 ,  G01B11/2441

摘要： The apparatus according to the invention comprises an object lens which can operate in at least two different measuring modes. In a first, interference mode a workpiece is measured by means of interference optometry. In a second, imaging measuring mode an optical image is produced, for example, on a camera-like detector array and may be applied to an image processing routine. Switching between the two measuring modes is performed by the type of illumination of the object lens and an element which is disposed preferably in the reference beam path of an interferometer and which activates or deactivates the reference beam path dependent on the spectral composition of the utilized light. In this manner a simple and rapid changeover between the two measuring modes is provided, without the need for replacing or even for moving the object lens. Apart from the rapidity of changeover, a good correlation is achieved between the measuring data which are yielded by the interferometry and by the image processing and which are obtained in one and the same reference coordinate system.

摘要翻译： 根据本发明的装置包括可以以至少两种不同测量模式操作的物镜。 首先，干涉模式通过干涉验光测量工件。 第二，成像测量模式，例如，在照相机状检测器阵列上产生光学图像，并且可以应用于图像处理程序。 在两个测量模式之间的切换是通过物镜的照明类型和优选地设置在干涉仪的参考光束路径中的元件执行的，并且根据所使用的光的光谱组成激活或去激活参考光束路径 。 以这种方式，提供了两种测量模式之间的简单和快速的切换，而不需要更换或甚至用于移动物镜。 除了切换的快速性之外，在由干涉测量产生的测量数据和图像处理之间获得的测量数据与在相同的参考坐标系中获得的良好的相关性。

公开(公告)号：US20070035744A1

公开(公告)日：2007-02-15

申请号：US11585621

申请日：2006-10-24

申请人： Peter Lehmann ,  Norbert Steffens

发明人： Peter Lehmann ,  Norbert Steffens

IPC分类号： G01B11/02

CPC分类号： G01B9/04 ,  G01B11/2441

摘要： The apparatus according to the invention comprises an object lens which can operate in at least two different measuring modes. In a first, interference mode a workpiece is measured by means of interference optometry. In a second, imaging measuring mode an optical image is produced, for example, on a camera-like detector array and may be applied to an image processing routine. Switching between the two measuring modes is performed by the type of illumination of the object lens and an element which is disposed preferably in the reference beam path of an interferometer and which activates or deactivates the reference beam path dependent on the spectral composition of the utilized light. In this manner a simple and rapid changeover between the two measuring modes is provided, without the need for replacing or even for moving the object lens. Apart from the rapidity of changeover, a good correlation is achieved between the measuring data which are yielded by the interferometry and by the image processing and which are obtained in one and the same reference coordinate system.

摘要翻译： 根据本发明的装置包括可以以至少两种不同测量模式操作的物镜。 首先，干涉模式通过干涉验光测量工件。 第二，成像测量模式，例如，在照相机状检测器阵列上产生光学图像，并且可以应用于图像处理程序。 在两个测量模式之间的切换是通过物镜的照明类型和优选地设置在干涉仪的参考光束路径中的元件执行的，并且根据所使用的光的光谱组成激活或去激活参考光束路径 。 以这种方式，提供了两种测量模式之间的简单和快速的切换，而不需要更换或甚至用于移动物镜。 除了切换的快速性之外，在由干涉测量产生的测量数据和图像处理之间获得的测量数据与在相同的参考坐标系中获得的良好的相关性。