Invention Grant
US07547559B2 Method for forming MRAM bit having a bottom sense layer utilizing electroless plating
有权
用于形成具有利用无电镀的底部感测层的MRAM钻头的方法
- Patent Title: Method for forming MRAM bit having a bottom sense layer utilizing electroless plating
- Patent Title (中): 用于形成具有利用无电镀的底部感测层的MRAM钻头的方法
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Application No.: US11657725Application Date: 2007-01-25
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Publication No.: US07547559B2Publication Date: 2009-06-16
- Inventor: Hasan Nejad , James G. Deak
- Applicant: Hasan Nejad , James G. Deak
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dickstein Shapiro LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The present invention provides a method of forming an MRAM cell which minimizes the occurrence of electrical shorts during fabrication. A first conductor in a trench is provided in an insulating layer and an upper surface of the insulating layer and the first conductor is planarized. Then, a dielectric layer is deposited to a thickness slightly greater than the desired final thickness of a sense layer, which is formed later. The dielectric layer is then patterned and etched to form an opening for the cell shapes over the first conductor. Then, a permalloy is electroplated in the cell shapes to form the sense layer. The sense layer and dielectric layer are flattened and then a nonmagnetic tunnel barrier layer is deposited. Finally, the pinned layer is formed over the tunnel barrier layer.
Public/Granted literature
- US20070161127A1 Method for forming MRAM bit having a bottom sense layer utilizing electroless plating Public/Granted day:2007-07-12
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