Invention Grant
US07550900B2 Acoustic resonator device 有权
声谐振器装置

Acoustic resonator device
Abstract:
Acoustic resonator device (1) includes an active element (6) and a support provided with a membrane (5). The active element (6) is provided with at least one piezoelectric layer (10) and is surmounted by a multilayer stack (12). The multilayer stack (12) is provided with at least three layers, including at least one layer (15) of high acoustic impedance and at least one layer (13) of low acoustic impedance. An integrated circuit including at least one such acoustic resonator device is also disclosed.
Public/Granted literature
Information query
Patent Agency Ranking
0/0