Invention Grant
- Patent Title: Acoustic resonator device
- Patent Title (中): 声谐振器装置
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Application No.: US11009688Application Date: 2004-12-10
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Publication No.: US07550900B2Publication Date: 2009-06-23
- Inventor: Guillaume Bouche , Gregory Caruyer , Pascal Ancey
- Applicant: Guillaume Bouche , Gregory Caruyer , Pascal Ancey
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics SA
- Current Assignee: STMicroelectronics SA
- Current Assignee Address: FR Montrouge
- Agency: Fleit Gibbons Gutman Bongini & Bianco P.L.
- Agent Lisa K. Jorgenson; Jose Gutman
- Priority: FR0314567 20031212
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
Acoustic resonator device (1) includes an active element (6) and a support provided with a membrane (5). The active element (6) is provided with at least one piezoelectric layer (10) and is surmounted by a multilayer stack (12). The multilayer stack (12) is provided with at least three layers, including at least one layer (15) of high acoustic impedance and at least one layer (13) of low acoustic impedance. An integrated circuit including at least one such acoustic resonator device is also disclosed.
Public/Granted literature
- US20050168104A1 Acoustic resonator device Public/Granted day:2005-08-04
Information query
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