发明授权
- 专利标题： Acoustic resonator device
- 专利标题（中）： 声谐振器装置
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申请号： US11009688申请日： 2004-12-10
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公开(公告)号： US07550900B2公开(公告)日： 2009-06-23
- 发明人: Guillaume Bouche , Gregory Caruyer , Pascal Ancey
- 申请人： Guillaume Bouche , Gregory Caruyer , Pascal Ancey
- 申请人地址： FR Montrouge
- 专利权人： STMicroelectronics SA
- 当前专利权人： STMicroelectronics SA
- 当前专利权人地址： FR Montrouge
- 代理机构： Fleit Gibbons Gutman Bongini & Bianco P.L.
- 代理商 Lisa K. Jorgenson; Jose Gutman
- 优先权： FR0314567 20031212
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
Acoustic resonator device (1) includes an active element (6) and a support provided with a membrane (5). The active element (6) is provided with at least one piezoelectric layer (10) and is surmounted by a multilayer stack (12). The multilayer stack (12) is provided with at least three layers, including at least one layer (15) of high acoustic impedance and at least one layer (13) of low acoustic impedance. An integrated circuit including at least one such acoustic resonator device is also disclosed.
公开/授权文献
- US20050168104A1 Acoustic resonator device 公开/授权日：2005-08-04