发明授权
- 专利标题: Pellicle frame
- 专利标题(中): 防护薄膜框架
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申请号: US11161755申请日: 2005-08-16
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公开(公告)号: US07553551B2公开(公告)日: 2009-06-30
- 发明人: Ming-Lung Chiu , Nien-Chen Li
- 申请人: Ming-Lung Chiu , Nien-Chen Li
- 代理机构: Sinorica, LLC
- 代理商 Ming Chow
- 主分类号: B32B15/08
- IPC分类号: B32B15/08 ; B21C27/00
摘要:
A pellicle frame for pellicle for use with a photomask in a wafer lithographic processing process is disclosed to have the frame body made of a material containing silver that absorbs sulfide released from other materials of the pellicle, preventing formation of crystals on the mask pattern of the photomask after exposure. In an alternate form, the pellicle frame is made of aluminum alloy, ceramics, or stainless steel, and then coated with a layer of silver and a black coating of polymer, for example, Teflon, PEEK (Polyaryletherketone) or PFA (Perfluoroalkoxy).
公开/授权文献
- US20060127691A1 [PELLICLE FRAME] 公开/授权日:2006-06-15
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