公开(公告)号：US08881906B2

公开(公告)日：2014-11-11

申请号：US11521310

申请日：2006-09-15

申请人： Ming Lung Chiu

发明人： Ming Lung Chiu

IPC分类号： B65D85/00 ,  H01L21/673

CPC分类号： H01L21/67373

摘要： The present invention discloses a pod which includes a lower cover member, an upper cover member and a guiding locking piece. The guiding locking piece deployed on one side of the upper cover member of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a second slope, two openings deployed on two side areas of the overall structure, and an upper locking piece and a lower locking piece deployed in each of two openings. When the mask is placed into the lower cover member of pod and is covered by the upper cover member, the mask is pushed to certain position and supported and locked by the upper locking piece and the lower locking piece.

摘要翻译： 本发明公开了一种吊舱，其包括下盖构件，上盖构件和引导锁定件。 所述引导锁定件部署在所述荚的上盖部件的一侧上，其整体结构由连接到连接到第二倾斜部的第一斜坡的平坦基部形成，所述第一倾斜部分布在所述整个结构的两个侧面区域上 ，以及在两个开口中的每一个中展开的上部锁定件和下部锁定件。 当掩模被放置在容器的下盖构件中并且被上盖构件覆盖时，掩模被推到某个位置并被上锁定件和下锁定件支撑并锁定。

公开(公告)号：US07553551B2

公开(公告)日：2009-06-30

申请号：US11161755

申请日：2005-08-16

申请人： Ming-Lung Chiu ,  Nien-Chen Li

发明人： Ming-Lung Chiu ,  Nien-Chen Li

IPC分类号： B32B15/08 ,  B21C27/00

CPC分类号： B32B15/013 ,  B32B15/017 ,  B32B15/018 ,  Y10T428/12361 ,  Y10T428/12569 ,  Y10T428/12611 ,  Y10T428/1275 ,  Y10T428/161 ,  Y10T428/31544 ,  Y10T428/31678

摘要： A pellicle frame for pellicle for use with a photomask in a wafer lithographic processing process is disclosed to have the frame body made of a material containing silver that absorbs sulfide released from other materials of the pellicle, preventing formation of crystals on the mask pattern of the photomask after exposure. In an alternate form, the pellicle frame is made of aluminum alloy, ceramics, or stainless steel, and then coated with a layer of silver and a black coating of polymer, for example, Teflon, PEEK (Polyaryletherketone) or PFA (Perfluoroalkoxy).

摘要翻译： 公开了一种用于在晶片光刻加工工艺中与光掩模一起使用的防护薄膜组件的防护薄膜框架，其具有由含有银的材料制成的框架体，该材料吸收从防护薄膜的其它材料释放的硫化物，从而防止在该防护薄膜的掩模图案上形成晶体 曝光后的光掩模 以替代形式，防护薄膜组件框架由铝合金，陶瓷或不锈钢制成，然后涂覆有一层银和黑色涂层的聚合物，例如特氟隆，PEEK（聚芳醚酮）或PFA（全氟烷氧基）。

公开(公告)号：US20060127205A1

公开(公告)日：2006-06-15

申请号：US11161754

申请日：2005-08-16

申请人： Ming-Lung Chiu ,  Yu-Chian Yan

发明人： Ming-Lung Chiu ,  Yu-Chian Yan

IPC分类号： B65B69/00 ,  B65B21/02 ,  B65G65/04 ,  B65G65/34

CPC分类号： H01L21/67376 ,  G03F1/66 ,  H01L21/67393 ,  H01L21/67396

摘要： An airtight semiconductor transferring container is disclosed to included a container base, an elastically deformable packing member covered on the top surface of the container base, and a top cover closed on the container base, the top cover having an outer cover body, and an elastically deformable inner lining shell fitted into the outer cover body, the elastically deformable inner lining shell having a downwardly protruding peripheral flange, which is pressed on the border area of the elastically deformable packing member to keep the inside space of the airtight semiconductor transferring container in an airtight status after closing of the top cover on the container base.

摘要翻译： 公开了一种气密半导体转移容器，其包括容器基座，覆盖在容器基座的顶表面上的可弹性变形的填充构件和封闭在容器基座上的顶盖，顶盖具有外盖主体和弹性 可弹性变形的内衬壳体具有向下突出的周边凸缘，该凸缘被压在可弹性变形的衬垫构件的边界区域上，以将气密半导体转移容器的内部空间保持在 关闭集装箱基座顶盖后的气密状态。

公开(公告)号：US20080041759A1

公开(公告)日：2008-02-21

申请号：US11541547

申请日：2006-10-03

申请人： Ming-Lung Chiu ,  Pao-Yi Lu

发明人： Ming-Lung Chiu ,  Pao-Yi Lu

IPC分类号： B65D85/00

CPC分类号： H01L21/67369

摘要： A wafer holding device for a wafer pod is disclosed. The disclosed wafer holding device includes a support frame mounted on one side of the housing of the wafer pod, an actuating frame, two rotating arms and two wafer retainers. When the housing and the base of a wafer pod are assembled, the actuating frame moves and forces the wafer retainers to rotate in a direction perpendicular to the edge surface of the wafers.

摘要翻译： 公开了一种用于晶片盒的晶片保持装置。 所公开的晶片保持装置包括安装在晶片盒的壳体的一侧的支撑框架，致动框架，两个旋转臂和两个晶片保持器。 当晶片盒的壳体和基座组装时，致动框架移动并迫使晶片保持器沿垂直于晶片边缘表面的方向旋转。

公开(公告)号：US20070227940A1

公开(公告)日：2007-10-04

申请号：US11521310

申请日：2006-09-15

申请人： Ming Lung Chiu

发明人： Ming Lung Chiu

IPC分类号： B65D85/00

CPC分类号： H01L21/67373

摘要： The present invention discloses a guiding locking piece deployed on one side of the body of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a second slope, two first openings deployed on two side areas of the overall structure, and an upper locking piece and a lower locking piece deployed in each of said first openings, and at least a leading track further set up near the central area of the overall structure. When the mask is placed in pod, the mask is pushed to certain position and supported and locked by the upper locking piece and the lower locking piece.

摘要翻译： 本发明公开了一种引导锁定件，其部署在荚体的一侧上，其整体结构由连接到连接到第二斜坡的第一斜坡的平坦基部形成，两个第一开口部署在两个侧面区域 整体结构，以及部署在每个所述第一开口中的上部锁定片和下部锁定片，以及至少一个引导轨道，其进一步设置在整个结构的中心区域附近。 当面罩放置在容器中时，面罩被推到某一位置，由上锁定件和下锁定件支撑并锁定。

公开(公告)号：US20110215029A1

公开(公告)日：2011-09-08

申请号：US13110211

申请日：2011-05-18

申请人： Ming-Lung CHIU

发明人： Ming-Lung CHIU

IPC分类号： B65D85/00

CPC分类号： H01L21/67373

摘要： The present invention discloses a pod which includes a lower cover member, an upper cover member and a guiding locking piece. The a guiding locking piece deployed on one side of the upper cover member of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a second slope, two openings deployed on two side areas of the overall structure, and an upper locking piece and a lower locking piece deployed in each of two openings. When the mask is placed into the lower cover member of pod and is covered by the upper cover member, the mask is pushed to certain position and supported and locked by the upper locking piece and the lower locking piece.

摘要翻译： 本发明公开了一种吊舱，其包括下盖构件，上盖构件和引导锁定件。 引导锁定件，其部署在荚的上盖构件的一侧，其整体结构由连接到连接到第二斜坡的第一斜坡的平坦基部形成，两个开口部分布置在总体的两个侧面区域 结构，以及在两个开口中的每一个中展开的上部锁定件和下部锁定件。 当掩模被放置在容器的下盖构件中并且被上盖构件覆盖时，掩模被推到某个位置并被上锁定件和下锁定件支撑并锁定。

公开(公告)号：US07556153B2

公开(公告)日：2009-07-07

申请号：US11541547

申请日：2006-10-03

申请人： Ming-Lung Chiu ,  Pao-Yi Lu

发明人： Ming-Lung Chiu ,  Pao-Yi Lu

IPC分类号： B65D85/00

CPC分类号： H01L21/67369

摘要： A wafer holding device for a wafer pod is disclosed. The disclosed wafer holding device includes a support frame mounted on one side of the housing of the wafer pod, an actuating frame, two rotating arms and two wafer retainers. When the housing and the base of a wafer pod are assembled, the actuating frame moves and forces the wafer retainers to rotate in a direction perpendicular to the edge surface of the wafers.

摘要翻译： 公开了一种用于晶片盒的晶片保持装置。 所公开的晶片保持装置包括安装在晶片盒的壳体的一侧的支撑框架，致动框架，两个旋转臂和两个晶片保持器。 当晶片盒的壳体和基座组装时，致动框架移动并迫使晶片保持器沿垂直于晶片边缘表面的方向旋转。

公开(公告)号：US20090172708A1

公开(公告)日：2009-07-02

申请号：US11965000

申请日：2007-12-27

申请人： Yu-Fong CHO ,  Chong-Li Liu ,  Ming-Lung Chiu

发明人： Yu-Fong CHO ,  Chong-Li Liu ,  Ming-Lung Chiu

IPC分类号： G06F3/00

CPC分类号： G06F9/45537 ,  G06F9/451

摘要： A method and system for enabling an auxiliary system, such as a SideShow device, to support enhanced features is provided. Specifically, one embodiment of the present invention sets forth a method, which includes the steps of emulating a physical communication channel to establish a virtual communication channel, encapsulating data associated with a first function defined by a first Application Programming Interface (API) and utilized to implement an enhanced feature, and sending the encapsulated data through the virtual communication channel for an embedded operation system (OS) to manage hardware resources of the auxiliary system to perform the enhanced feature.

摘要翻译： 提供了一种用于使辅助系统（例如SideShow设备）能够支持增强特征的方法和系统。 具体地，本发明的一个实施例提出了一种方法，其包括模拟物理通信信道以建立虚拟通信信道的步骤，封装与由第一应用编程接口（API）定义的第一功能相关联的数据，并被利用 实现增强特征，并通过用于嵌入式操作系统（OS）的虚拟通信信道发送封装的数据，以管理辅助系统的硬件资源以执行增强特征。

公开(公告)号：US07469788B2

公开(公告)日：2008-12-30

申请号：US11161754

申请日：2005-08-16

申请人： Ming-Lung Chiu ,  Yu-Chian Yan

发明人： Ming-Lung Chiu ,  Yu-Chian Yan

IPC分类号： B65D85/86

CPC分类号： H01L21/67376 ,  G03F1/66 ,  H01L21/67393 ,  H01L21/67396

摘要： An airtight semiconductor transferring container is disclosed to included a container base, an elastically deformable packing member covered on the top surface of the container base, and a top cover closed on the container base, the top cover having an outer cover body, and an elastically deformable inner lining shell fitted into the outer cover body, the elastically deformable inner lining shell having a downwardly protruding peripheral flange, which is pressed on the border area of the elastically deformable packing member to keep the inside space of the airtight semiconductor transferring container in an airtight status after closing of the top cover on the container base.

摘要翻译： 公开了一种气密半导体转移容器，其包括容器基座，覆盖在容器基座的顶表面上的可弹性变形的填充构件和封闭在容器基座上的顶盖，顶盖具有外盖主体和弹性 可弹性变形的内衬壳体具有向下突出的周边凸缘，该凸缘被压在可弹性变形的衬垫构件的边界区域上，以将气密半导体转移容器的内部空间保持在 关闭集装箱基座顶盖后的气密状态。

公开(公告)号：US20080268183A1

公开(公告)日：2008-10-30

申请号：US11971277

申请日：2008-01-09

申请人： Ming Lung CHIU

发明人： Ming Lung CHIU

IPC分类号： B32B1/00

CPC分类号： H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

摘要： A reticle carrier is disclosed in the invention, which may be combined with an inflator. The reticle carrier comprises a lid and a base; a combination of the lid and the base forms an internal space for receiving at least a reticle. The base includes a body having a plurality of through holes; each of the through holes has an inner-opening at one end and an outer opening at another end thereof; a plurality of tongues are disposed on the inner-opening of the through holes for elastically sealing the through holes. The inflator allows gases to fill into the reticle carrier via the through holes, so that the reticle carrier may be effectively cleaned by allowing gases to be filled into the reticle carrier, thus making the reticle carrier safer for storage.

摘要翻译： 在本发明中公开了一种标线载体，其可以与充气机组合。 标线架载体包括盖和基座; 盖和底座的组合形成用于接收至少一个掩模版的内部空间。 底座包括具有多个通孔的主体; 每个通孔在一端具有内开口，在另一端具有外开口; 在通孔的内部开口上设置多个舌片，用于弹性地密封通孔。 充气机允许气体通过通孔填充到标线载体中，使得通过允许气体填充到标线载体中，可以有效地清洁标线载体，从而使得掩模版载体更安全地存放。