Invention Grant
US07553609B2 Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece 失效
压电振动片,压电振动片,压电振子,振荡器,电子设备和无线电控制钟表的制造方法

  • Patent Title: Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
  • Patent Title (中): 压电振动片,压电振动片,压电振子,振荡器,电子设备和无线电控制钟表的制造方法
  • Application No.: US11605165
    Application Date: 2006-11-28
  • Publication No.: US07553609B2
    Publication Date: 2009-06-30
  • Inventor: Kiyoshi Aratake
  • Applicant: Kiyoshi Aratake
  • Applicant Address: JP Chiba
  • Assignee: Seiko Instruments Inc.
  • Current Assignee: Seiko Instruments Inc.
  • Current Assignee Address: JP Chiba
  • Agency: Brinks Hofer Gilson & Lione
  • Priority: JP2005-346399 20051130
  • Main IPC: H03H3/02
  • IPC: H03H3/02
Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
Abstract:
There are provided a piezoelectric vibrating piece, which has been more miniaturized and whose efficiency has been more increased, by easily and certainly electrode-dividing an exciting electrode, and a manufacturing method of the same. There is provided a manufacturing method of a piezoelectric vibrating piece, characterized by having an exposure process in which a mask having an opening part is disposed such that the opening part is located on at least either edge of a 1st edge, in two places, formed by a main face and a side face of a vibrating arm part or a 2nd edge, in two places, formed by the main face and a side face of a groove part, and a parallel light is slantingly irradiated through the opening part toward at least either of a bottom face or an outside of the groove part while following a face intersecting perpendicularly to a longitudinal direction of the vibrating arm part to thereby expose a photosensitive film.
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