Electronic device and method of manufacturing the same
    2.
    发明授权
    Electronic device and method of manufacturing the same 有权
    电子设备及其制造方法

    公开(公告)号:US08278567B2

    公开(公告)日:2012-10-02

    申请号:US12819858

    申请日:2010-06-21

    CPC classification number: H03H9/1021 Y10T29/49169

    Abstract: In a structure where an electronic component is mounted on a glass base material, an external electrode is provided on an opposite side to the component mounted on the base, and a through electrode and the base are welded to each other at a temperature equal to or higher than a glass softening point, electrical conduction is ensured between the electronic component and the external electrode. An electronic device includes a base, a through electrode which pass through the base and has a metal film formed on both end surfaces after an insulating material on the surface is removed by polishing, an electronic component which is provided on one surface of the through electrode through a connection portion, an external electrode which is provided on an opposite side to a side of the base on which the electronic component is provided, and a cap which protects the electronic component on the base.

    Abstract translation: 在将电子部件安装在玻璃基材上的结构中,外部电极设置在与安装在基座上的部件相反的一侧,并且贯通电极和基座以等于或等于或等于 高于玻璃软化点,确保电子部件和外部电极之间的导电性。 一种电子器件,其特征在于,在通过研磨除去表面的绝缘材料之后,通过所述基底并穿过形成在所述两端面上的金属膜的电极,形成在所述贯通电极的一个表面上的电子部件 通过连接部分,设置在设置有电子部件的基部的相对侧的外部电极以及保护电子部件在基部上的盖。

    CRYSTAL SUBSTRATE ETCHING METHOD, PIEZOELECTRIC VIBRATING REED, A PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE
    3.
    发明申请
    CRYSTAL SUBSTRATE ETCHING METHOD, PIEZOELECTRIC VIBRATING REED, A PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE 审中-公开
    晶体衬底蚀刻方法,压电振动反应器,压电振动器,振荡器,电子器件和无线电控制时序

    公开(公告)号:US20110226731A1

    公开(公告)日:2011-09-22

    申请号:US13050301

    申请日:2011-03-17

    CPC classification number: H03H3/02 H01L41/332 H03H9/1021 H03H2003/026

    Abstract: Provided are a crystal substrate etching method capable of processing with high accuracy, a piezoelectric vibrating reed of which the outer shape is formed by the method, a piezoelectric vibrator having the piezoelectric vibrating reed, and an oscillator, an electronic device, and a radio-controlled timepiece having the piezo-electric vibrator. A crystal substrate and an auxiliary substrate are successively dry-etched from a second surface side of the crystal substrate in a state where the auxiliary substrate having approximately the same etching rate as the crystal substrate is bonded to a first surface of the crystal substrate.

    Abstract translation: 提供一种能够高精度地加工的晶体基板蚀刻方法,通过该方法形成外部形状的压电振动片,具有压电振动片的压电振动器,以及振荡器,电子设备和无线电设备, 具有压电振动器的控制时计。 在与晶体基板的蚀刻速率大致相同的辅助基板与晶体基板的第一面接合的状态下,从晶体基板的第二面侧依次干蚀刻晶体基板和辅助基板。

    PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, PIEZOELECTRIC VIBRATOR, METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIEC
    4.
    发明申请
    PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, PIEZOELECTRIC VIBRATOR, METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIEC 审中-公开
    图案形成方法,图案形成装置,压电振动器,制造压电振动器的方法,振荡器,电子装置和无线电控制的TIMEPIEC

    公开(公告)号:US20110219593A1

    公开(公告)日:2011-09-15

    申请号:US13047238

    申请日:2011-03-14

    Inventor: Kiyoshi Aratake

    Abstract: Provided are a pattern forming method and apparatus capable of suppressing the occurrence of pattern blurring when forming a pattern on a substrate by a sputtering method, a piezoelectric vibrator having the electrode pattern formed by the pattern forming method and apparatus, a method of manufacturing the piezoelectric vibrator, and an oscillator, an electronic apparatus, and a radio-controlled timepiece each having the piezoelectric vibrator.A pattern forming method for forming a pattern on a substrate in a deposition chamber by a sputtering method is provided. The deposition chamber includes a table configured to be able to dispose a plurality of substrates thereon and a target which serves as a raw material of the pattern. The method including the steps of: placing a masking material having openings corresponding to the pattern on the surface of the substrate; moving the plurality of substrates into the deposition chamber so that the plurality of substrates is disposed on the table; rotating the table so that the surface of the substrate passes a position facing the target; and allowing one substrate to pass the position facing the target several times to form the pattern on the surface of the substrate.

    Abstract translation: 提供了一种图案形成方法和装置,其能够通过溅射法在基板上形成图案时抑制图案模糊的发生,具有通过图案形成方法和装置形成的电极图案的压电振动器,制造压电元件的方法 振动器,以及具有压电振动器的振荡器,电子设备和无线电控制的钟表。 提供了一种通过溅射法在沉积室中的基板上形成图案的图案形成方法。 淀积室包括配置成能够在其上配置多个基板的台和用作图案的原料的靶。 该方法包括以下步骤:将具有对应于图案的开口的掩模材料放置在基板的表面上; 将多个基板移动到沉积室中,使得多个基板设置在工作台上; 旋转台,使得基板的表面通过面向目标的位置; 并且允许一个衬底经过面向靶的位置几次以在衬底的表面上形成图案。

    Electronic package having stress buffer layer on mounting surface thereof, and method for manufacturing same
    5.
    发明授权
    Electronic package having stress buffer layer on mounting surface thereof, and method for manufacturing same 有权
    在其安装表面上具有应力缓冲层的电子封装及其制造方法

    公开(公告)号:US07923904B2

    公开(公告)日:2011-04-12

    申请号:US12851686

    申请日:2010-08-06

    Abstract: An electronic component capable of withstanding stress from a printed circuit board or the like is provided. In an electronic component, a cavity hermetically sealed by a base and a lid is formed. In the cavity, a crystal resonator is supported by a supporting member over the top surface of the base. The base is made of glass. A stress buffer layer made of a conductive resin or the like is formed over the whole bottom surface of the base. An external electrode and an external electrode that are in continuity with the electrodes of the crystal resonator individually extend to the bottom surface of the stress buffer layer via the side surfaces of the base and stress buffer layer. The thus configured electronic component is surface-mounted by, for example, soldering the external electrode and external electrode formed on the bottom surface of the stress buffer layer to a printed circuit board.

    Abstract translation: 提供能够承受来自印刷电路板等的应力的电子部件。 在电子部件中,形成由基座和盖子密封的空腔。 在空腔中,晶体谐振器由支撑构件支撑在基座的顶表面上。 基座由玻璃制成。 在基底的整个底面上形成由导电性树脂等构成的应力缓冲层。 与晶体谐振器的电极连续的外部电极和外部电极,经由基极和应力缓冲层的侧面分别延伸到应力缓冲层的底面。 这样配置的电子部件通过例如将形成在应力缓冲层的底面上的外部电极和外部电极焊接到印刷电路板来进行表面安装。

    Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
    7.
    发明授权
    Manufacturing method of piezoelectric vibrating piece, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece 失效
    压电振动片,压电振动片,压电振子,振荡器,电子设备和无线电控制钟表的制造方法

    公开(公告)号:US07553609B2

    公开(公告)日:2009-06-30

    申请号:US11605165

    申请日:2006-11-28

    Inventor: Kiyoshi Aratake

    Abstract: There are provided a piezoelectric vibrating piece, which has been more miniaturized and whose efficiency has been more increased, by easily and certainly electrode-dividing an exciting electrode, and a manufacturing method of the same. There is provided a manufacturing method of a piezoelectric vibrating piece, characterized by having an exposure process in which a mask having an opening part is disposed such that the opening part is located on at least either edge of a 1st edge, in two places, formed by a main face and a side face of a vibrating arm part or a 2nd edge, in two places, formed by the main face and a side face of a groove part, and a parallel light is slantingly irradiated through the opening part toward at least either of a bottom face or an outside of the groove part while following a face intersecting perpendicularly to a longitudinal direction of the vibrating arm part to thereby expose a photosensitive film.

    Abstract translation: 提供一种压电振动片及其制造方法,该压电振动片通过容易且确实地分选激励电极而使其更小型化并且效率提高得更多。 提供了一种压电振动片的制造方法,其特征在于具有曝光处理,其中具有开口部的掩模设置成使得开口部位于第一边缘的至少任一边缘上,形成在两个位置 通过由主面和凹槽部分的侧面形成的振动臂部分或第二边缘的主表面和侧面,并且平行的光通过开口部分至少朝向至少 沿着垂直于振动臂部的纵向方向相交的面从而暴露感光性膜的凹槽部的底面或外侧。

    Manufacturing method of quartz crystal vibrating piece, quartz crystal vibrator, oscillator, electronic device, and electric wave clock
    8.
    发明申请
    Manufacturing method of quartz crystal vibrating piece, quartz crystal vibrator, oscillator, electronic device, and electric wave clock 失效
    石英振动片,石英晶体振子,振荡器,电子器件和电波时钟的制造方法

    公开(公告)号:US20060175288A1

    公开(公告)日:2006-08-10

    申请号:US11341745

    申请日:2006-01-27

    Inventor: Kiyoshi Aratake

    Abstract: To provide a manufacturing method of a small-sized quartz crystal vibrating piece, which can decrease processing variations due to accuracy of matching a front and a rear of a mask in etching of a quartz crystal wafer. According to a manufacturing method of a quartz crystal vibrating piece to be processed by etching a quartz crystal wafer from a front and a rear, a size of a mask used for etching is changed depending on a front and a rear of the quartz crystal wafer, a mask of a small size is defined as a reference mask, and a mask of a large size is defined as a relative mask so as to perform etching. The mask is unified to the size to be processed from the reference mask by over etching, even processing accuracy can be obtained, the small-sized quartz crystal vibrating piece can be manufactured, and the quartz crystal vibrating piece can be provided inexpensively and stably.

    Abstract translation: 提供一种小型石英振动片的制造方法,其能够降低在蚀刻石英晶片时掩模的前后的匹配精度的加工变化。 根据通过从前后蚀刻石英晶片来处理的石英振动片的制造方法,用于蚀刻的掩模的尺寸根据石英晶片的前后而变化, 将小尺寸的掩模定义为参考掩模,将大尺寸的掩模定义为相对掩模,以进行蚀刻。 通过过蚀刻将掩模与参考掩模的尺寸统一,即使可以获得加工精度,也可以制造小型石英振动片,并且可以廉价且稳定地提供石英振动片。

    Method for manufacturing piezo-electric vibrator
    9.
    发明授权
    Method for manufacturing piezo-electric vibrator 失效
    制造压电振子的方法

    公开(公告)号:US06996884B2

    公开(公告)日:2006-02-14

    申请号:US10358860

    申请日:2003-02-05

    Abstract: In a method for manufacturing a piezo-electric vibrator, a vibrator is provided having a vibrator piece and a frame surrounding a periphery of the vibrator piece. A first exciting electrode is formed on the vibrator piece. A weight is disposed on the vibrator piece in spaced-apart relation to the first exciting electrode. A characteristic of the vibrator is then adjusted. The first exciting electrode is removed and a metal film is formed on a surface of the vibrator. The metal film is patterned and a second exciting electrode is formed on the vibrator piece.

    Abstract translation: 在制造压电振动器的方法中,设置振动器,振动片和围绕振动片周边的框架。 第一激励电极形成在振动片上。 重物以与第一激励电极隔开的关系设置在振动片上。 然后调整振动器的特性。 去除第一激发电极并在振动器的表面上形成金属膜。 图案化金属膜,在振动片上形成第二激励电极。

    Electrode structure of piezoelectric vibrator
    10.
    发明授权
    Electrode structure of piezoelectric vibrator 失效
    压电振子的电极结构

    公开(公告)号:US06504290B2

    公开(公告)日:2003-01-07

    申请号:US09771066

    申请日:2001-01-26

    CPC classification number: H03H9/215 H01L41/053 H03H9/0595 H03H9/1035 Y10T29/42

    Abstract: A piezoelectric vibrator has a piezoelectric oscillating plate having a piezoelectric vibrator piece and a frame integrally connected to a base end portion of the piezoelectric vibrator piece and surrounding the piezoelectric vibrator piece. A pair of excitation electrodes are disposed on surfaces of two sides of the piezoelectric vibrator piece for vibrating the piezoelectric vibrator piece. Bond films are formed on upper and lower surfaces of the frame and are connected to the excitation electrodes. A pair of lids seal the piezoelectric vibrator piece in an airtight manner via the bond films without hampering vibration of the piezoelectric vibrator piece. Shortcircuiting electrodes are disposed on the piezoelectric oscillating plate for causing a shortcircuiting to electrically connect the bond films to each other.

    Abstract translation: 压电振动器具有压电振荡板,该压电振荡板具有压电振子片和与压电振动片的基端部一体连接并围绕压电振动片的框架。 一对激励电极设置在压电振动片的两侧的表面上,用于振动压电振动片。 结合膜形成在框架的上表面和下表面上并连接到激励电极。 一对盖子通过粘合膜以气密的方式密封压电振动片,而不会妨碍压电振动片的振动。 短路电极设置在压电振荡板上,用于使短路将粘合膜彼此电连接。

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