Invention Grant
US07555929B2 Micromechanical sensor having fault identification 有权
具有故障识别的微机械传感器

Micromechanical sensor having fault identification
Abstract:
A sensor includes a micromechanical functional part and an electronic evaluation circuit which are in electrical connection to each other using electrical conductors. An arrangement for carrying out an auto-test of the sensor is provided in such a way that fault identification of at least one electrical connection is implemented.
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